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AMAT 0140-20116
Brand & Part Number: Applied Materials (AMAT) 0140-20116
Product Name: Temperature Monitoring / Control Board
Product Description: A dedicated PCB for accurate temperature sensing, signal conditioning, and closed-loop control of heaters or chillers.
Technical Specifications:
- Sensor Inputs: Compatible with RTD (Pt100), thermocouple (Type J/K/T)
Detailed content
- Outputs: PWM or analog control signals for heater power supplies
- Accuracy: ±0.1°C for high-precision measurements
Functional Features:
- Linearization and cold-junction compensation for thermocouple inputs
- PID (Proportional-Integral-Derivative) control algorithm for stable temperature regulation
- Over-temperature protection and alarm triggering
- Isolated inputs to eliminate ground loops
Application: Deployed in temperature-critical subsystems such as wafer pedestals (ESC), gas lines, and lamp heaters in CVD, ALD, and Thermal Processing modules.
