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Technical Specifications:
- Material: Electropolished 316L stainless steel (VIM/VAR grade)
- Inner Surface: Ra ≤ 0.25 μm (electropolished and passivated)
- Pressure Rating: Up to 3000 psig (207 bar)
- Leak Integrity: Helium leak rate < 1 x 10⁻⁹ atm-cc/sec
Functional Features:
- Ultra-smooth bore prevents particle entrapment and ensures laminar flow
- Excellent corrosion resistance to corrosive gases (e.g., HCl, NH₃, SiH₄)
- Precision-welded or mechanically sealed connections for zero contamination
- Complies with SEMI standards for gas distribution systems
Application: Used in gas cabinets, process modules, and distribution panels for delivering specialty gases in CVD, ALD, and Oxidation processes.
