Digital guide
You are here:
Detailed content
Technical Specifications:
- Material: Perfluoroelastomer (FFKM/Kalrez), Viton, or Quartz
- Hardness: 70-90 Shore A (for elastomers)
- Temperature Range: -40°C to +300°C (elastomers); up to 1000°C (Quartz)
Functional Features:
- Ultra-low outgassing and particle emission for clean vacuum environments
- Excellent chemical resistance to process gases and plasmas
- High compression set resistance for long-term sealing performance
- Non-contaminating, compliant with SEMI F20 standard
Application: Used as edge seals, door gaskets, or chamber liners in vacuum chambers to prevent leaks and protect metal surfaces from corrosive processes.
