Digital guide
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AMAT 0050-00023
- Brand & Part Number: Applied Materials (AMAT) 0050-00023
- Product Name: Precision Gas Line Assembly
- Product Description: A high-purity stainless steel gas delivery line assembly for ultra-clean gas transport in semiconductor process chambers. It is engineered to prevent contamination and ensure precise, stable gas flow control.
Detailed content
- Technical Specifications:
- Material: Electropolished 316L stainless steel
- Surface Finish: Ra ≤ 0.5 μm (ultra-smooth electropolished interior)
- Pressure Rating: 0 to 250 PSI
- Fitting Type: VCR face-seal fittings
- Length: Customized for specific equipment configuration
- Leak Rate: ≤ 1×10⁻⁹ atm-cc/s He
- Functional Features:
- Ultra-high purity design eliminates particle generation and outgassing
- Excellent corrosion resistance to process gases (including corrosive and oxidizing gases)
- Precision welding ensures zero leakage under dynamic pressure conditions
- Fully passivated interior surface for minimal gas absorption/desorption
- Applications:
- Gas distribution systems for CVD, PVD, etch and deposition processes
- High-purity process gas delivery in AMAT Centura, P5000 platforms
- Semiconductor wafer fabrication processes requiring ultra-clean gas delivery
