Digital guide
You are here:
AMAT 0020-76429
- Brand & Part Number: Applied Materials (AMAT) 0020-76429
- Product Name: Chamber Liner Assembly
- Product Description: A precision-engineered multi-piece chamber liner assembly designed to line the interior of semiconductor process chambers. It protects the chamber body from process-induced corrosion and deposition, and maintains consistent process conditions.
Detailed content
- Technical Specifications:
- Material: Anodized aluminum, stainless steel, or ceramic (process-specific)
- Configuration: Segmented multi-piece design for easy installation
- Surface Finish: Electropolished (metal) or polished (ceramic)
- Thickness: 2.0 ~ 5.0 mm
- Fit: Precision-machined to match chamber interior contours
- Functional Features:
- Protects chamber body from corrosive gases and plasma
- Collects process byproducts and facilitates maintenance cleaning
- Consistent surface properties ensure stable process repeatability
- Modular design allows for individual segment replacement
- Compatible with in-situ cleaning processes
- Applications:
- Interior chamber lining in AMAT Centura, Endura etch and deposition systems
- Metal etch, dielectric etch, and PVD process chambers
- High-volume semiconductor manufacturing environments
