Digital guide
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AMAT 0020-25826
- Brand & Part Number: Applied Materials (AMAT) 0020-25826
- Product Name: Ceramic Insulator, DC Bias
- Product Description: A high-performance ceramic insulator designed to provide electrical isolation for DC bias applications in semiconductor plasma process chambers. It combines excellent dielectric strength with thermal stability and chemical resistance.
Detailed content
- Technical Specifications:
- Material: High-purity alumina (Al₂O₃) or boron nitride (BN) ceramic
- Dielectric Strength: ≥ 15 kV/mm
- Volume Resistivity: ≥ 10¹⁴ Ω·cm
- Maximum Operating Temperature: 800°C (Al₂O₃) / 1,000°C (BN)
- Tolerance: ± 0.02 mm for critical dimensions
- Functional Features:
- Superior electrical insulation for high-voltage DC bias applications
- Excellent resistance to plasma erosion and chemical corrosion
- Low dielectric loss for stable high-frequency performance
- High thermal conductivity for efficient heat dissipation
- Precision machining ensures proper fit and alignment
- Applications:
- DC bias isolation in PVD, PE-CVD and RIE etch chambers
- Electrode and chuck insulation in AMAT Centura and Endura platforms
- High-voltage electrical isolation in semiconductor plasma processes
