Digital guide
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AMAT 0200-09317
- Brand & Part Number: Applied Materials (AMAT) 0200-09317
- Product Name: Ceramic Lift Pin Assembly
- Product Description: A high-performance ceramic lift pin designed for precise wafer lifting and positioning in semiconductor vacuum chambers. It features excellent wear resistance, thermal stability, and non-contaminating properties.
Detailed content
- Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic (≥ 99.5%)
- Diameter: Standard 3.0 mm (precision ground)
- Surface Finish: Polished to Ra ≤ 0.2 μm
- Thermal Conductivity: ~ 30 W/m·K
- Maximum Operating Temperature: 1,200°C
- Compatibility: 200mm/300mm wafer processing platforms
- Functional Features:
- Exceptional hardness and wear resistance for long service life
- Zero particle generation and non-contaminating to wafers
- Excellent thermal shock resistance and dimensional stability
- Low thermal expansion ensures precision positioning at high temperatures
- Non-porous structure prevents outgassing in vacuum environments
- Applications:
- Wafer lift systems in AMAT Endura, Producer, Centura platforms
- High-temperature semiconductor process chambers (CVD, ALD, RTP)
- Precision wafer handling and positioning in vacuum environments
