Digital guide
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AMAT 0050-76407
- Brand & Part Number: Applied Materials (AMAT) 0050-76407
- Product Name: OTB NW50 Foreline Adapter, Common Mainframe
- Product Description: A precision-machined vacuum foreline adapter for connecting OTB (On-Tool Booster) vacuum pumps to the common mainframe of semiconductor processing equipment. It provides a sealed, high-conductance transition between NW50 port and mainframe interface.
Detailed content
- Technical Specifications:
- Material: High-strength aluminum alloy (Type 6061-T6)
- Connection Standards: NW50 (NW flange) to mainframe-specific interface
- Surface Treatment: Hard anodized (black)
- Weight: 1.05 kg
- Operating Pressure: UHV to 1 atm
- Operating Temperature: -30°C to +120°C
- Functional Features:
- Optimized internal geometry for maximum vacuum conductance
- Zero-length design minimizes volume and reduces pump-down time
- Precision-machined sealing surfaces ensure UHV compatibility
- Rigid construction prevents vibration-induced leaks
- Compatible with NW50 centering rings and gaskets
- Applications:
- AMAT Centura mainframe vacuum system foreline connections
- OTB vacuum pump interface to process tool mainframe
- High-vacuum exhaust lines in semiconductor etch and deposition chambers
