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AMAT 0010-09395
Product Name: 8″ Wafer Lift Pin Assembly
Product Description: A precision 3-pin lift assembly designed to vertically position 8-inch (200mm) wafers in process chambers, ensuring accurate alignment during deposition and etching.
Technical Specifications:
- Material: 316L stainless steel (body), high-purity alumina (pin tip)
Detailed content
- Quantity: 3-pin set
- Stroke Length: 20 mm
- Vertical Repeatability: ±0.01 mm
- Pin Diameter: 6 mm
- Surface Finish: Electropolished (Ra ≤ 0.4 μm)
- Temperature Rating: -20°C to +300°C
- Vacuum Compatibility: 10⁻⁹ Torr
- Bearing Type: Precision linear ball bearings
Functional Features:
- Ultra-low particle generation for cleanroom compatibility
- Wear-resistant ceramic tips to prevent wafer scratching
- Backlash-free linear motion for precise positioning
- Sealed bearings to resist process gas contamination
- Easy alignment and installation with standard flanges
Application Scenarios: Wafer lifting and positioning in 200mm AMAT P5000 and Centura PVD/CVD/Etch chambers.
