Digital guide
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AMAT 0021-17526
- Brand & Part Number: Applied Materials (AMAT) 0021-17526
- Product Name: Upper Shield Assembly, Process Chamber
- Product Description: A precision-formed metal shield assembly installed in the upper region of semiconductor process chambers. It protects chamber components from deposition, controls plasma distribution, and maintains process uniformity.
Detailed content
- Technical Specifications:
- Material: High-purity aluminum alloy (Al 6061) or stainless steel
- Form: Precision stamped and formed multi-piece assembly
- Coating: Optional anti-reflective or plasma-resistant coating
- Thickness: 1.5 ~ 3.0 mm (process-dependent)
- Cleaning Class: Class 10 cleanroom assembled and packaged
- Functional Features:
- Optimized geometry for uniform plasma distribution
- Prevents unwanted deposition on chamber walls and components
- Easy to install and replace for chamber maintenance
- High structural rigidity to resist thermal deformation
- Low outgassing properties suitable for UHV environments
- Applications:
- Upper chamber shielding in PVD, CVD and etch processes
- AMAT Endura, PVD, and dielectric etch chamber components
- Process uniformity control and chamber component protection
