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AMAT 0021-97309
Product Name: ESC (Electrostatic Chuck) Disk Shutter Assembly
Product Description: A precision-machined aluminum shutter mechanism that physically protects the electrostatic chuck surface from contamination, plasma exposure, and physical damage during wafer exchange, idle periods, and maintenance.
Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy
Detailed content
- Surface Treatment: Hard anodized (25μm) + anti-spatter coating
- Actuation: Pneumatic rotary or linear drive (compatible with standard fab air)
- Operating Temperature: Up to 300°C continuous
- Seal: Fluoropolymer edge seal for particle containment
- Cycle Life: > 1,000,000 open/close cycles
- Mounting: Flange-mounted with precision alignment dowels
Key Features:
- Fast actuation (≤ 0.5 sec) minimizes process downtime
- Positive locking prevents accidental movement
- Sealed design contains particles and prevents cross-contamination
- Resists plasma erosion and chemical corrosion
- Direct drop-in replacement with no modifications required
Application Scenarios:
Deployed in AMAT Centura Etch, PVD, and CVD chambers utilizing ESC wafer clamping. Critical for processes requiring high cleanliness, such as metal gate etch and advanced dielectric deposition.
