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AMAT 0270-20296
Product Name: Precision Calibration & Alignment Tool Kit
Product Description: A specialized tool kit designed for the precise alignment, calibration, and maintenance of critical chamber components, such as electrostatic chucks (ESC), gas delivery nozzles, and wafer handling mechanisms. Ensures optimal equipment performance and process repeatability.
Technical Specifications:
- Material: Hardened tool steel, anodized aluminum, and ceramic gauge pins
Detailed content
- Precision: Tolerances ± 0.001mm (1μm) for critical gauging surfaces
- Kit Contents: Alignment gauges, depth micrometers, offset pins, torque wrench adapters, and custom-fit carrying case
- Surface Finish: Non-magnetic, passivated, and anti-reflective coatings
- Compatibility: For use with AMAT Centura, Endura, and Producer platforms
Key Features:
- Ensures micron-level precision for component alignment
- Prevents mechanical damage during maintenance procedures
- Custom-designed for direct fit with OEM components
- Ergonomic, rugged construction for fab-floor use
- Complete with calibration certificates for traceability
Application Scenarios:
Used by field service and maintenance engineers for chamber PM (preventive maintenance), ESC pedestal alignment, showerhead positioning, and robot calibration across all AMAT 200mm/300mm platforms.
