Digital guide
You are here:
AMAT 0050-08366
Product Name: High-Purity Fluid Delivery Tube / Manifold Line
Product Description: A seamless, precision-drawn stainless steel tubing assembly for ultra-high-purity (UHP) gas and liquid delivery in semiconductor process tool utility panels. Ensures contamination-free fluid transport.
Technical Specifications:
- Material: 316L VAR (Vacuum Arc Remelted) stainless steel
Detailed content
- Dimensions: 1/4″ OD x 0.035″ wall thickness (standard)
- Length: Custom cut to exact tool specifications
- Surface Finish: Electropolished (Ra < 0.4μm), internal passivated
- Cleanliness: UHP cleaned, double-bagged in Class 1 cleanroom
- Connections: Butt-welded or VCR fittings (metal gasket seal)
Key Features:
- Zero particle generation or outgassing
- Excellent corrosion resistance to halogenated process gases
- Smooth bore eliminates dead legs and entrapment zones
- Full traceability to material source and cleaning batch
- Pressure rated to 3000 psig (207 bar)
Application Scenarios:
Installed in AMAT gas cabinets, process tool utility panels, and distribution manifolds. Used for delivering UHP process gases (SiH₄, NH₃, WF₆, ClF₃) and cooling fluids.
