Digital guide
You are here:
AMAT 0200-01371
Product Name: Ceramic Membrane Electrode Assembly (200mm Dual-Cell ECP)
Product Description: A high-purity ceramic membrane component used in electrochemical plasma (ECP) processes. It acts as a dielectric barrier, facilitates uniform plasma generation, and provides electrical isolation between process electrodes.
Technical Specifications:
- Material: 99.9% high-purity alumina (Al₂O₃) ceramic
Detailed content
- Dimensions: 200mm diameter, precision thickness ± 0.05mm
- Dielectric Strength: ≥ 22 kV/mm
- Porosity: Non-porous, fully dense (≥ 3.95 g/cm³)
- Surface Finish: Ground & polished to Ra < 0.4μm
- Thermal Conductivity: ≥ 25 W/m·K
- Max Operating Temp: 800°C
Key Features:
- Excellent electrical isolation prevents parasitic discharges
- Ultra-low metallic impurities (ppb level) eliminate contamination
- High thermal shock resistance withstands rapid thermal cycling
- Chemically inert to all plasma chemistries
- Precision dimensional stability ensures process repeatability
Application Scenarios:
Exclusively used in AMAT ECP (Electrochemical Plasma) chambers for advanced cleaning, surface preparation, and material removal processes on 200mm wafers.
