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AMAT 0010-02258
Product Name: Heater Pedestal Base / ESC Support Assembly
Product Description: A precision-machined metal base that supports the wafer heater/ESC pedestal, provides thermal isolation, and integrates coolant passages for temperature regulation. It ensures mechanical stability and efficient heat transfer.
Technical Specifications:
- Material: Titanium alloy or oxygen-free copper (OFC)
Detailed content
- Cooling Circuit: Internal helical coolant channels (single/dual zone)
- Surface Flatness: < 3μm across pedestal mounting face
- Thermal Conductivity: Optimized for rapid heat extraction
- Vacuum Rating: UHV compatible, leak-tight to 1 x 10⁻⁹ mbar·l/s
- Mounting: Bolted interface with alignment dowels
Key Features:
- Maintains precise pedestal planarity under thermal load
- Efficient dual-zone cooling for tight temperature control
- Low thermal mass for fast transient response
- Integrated RF grounding path for plasma processes
- Rugged construction for millions of thermal cycles
Application Scenarios:
Found in AMAT Centura & Endura high-temperature process modules. Used in PECVD, RTP, and metal etch processes requiring pedestal temperatures up to 600°C.
