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AMAT 0010-17814
Product Name: Multi-Zone Heater Element / Cartridge Assembly
Product Description: A high-wattage, mineral-insulated (MI) cartridge heater designed for embedded installation in wafer pedestals and heat exchangers. Provides uniform, high-power heating for semiconductor process thermal control.
Technical Specifications:
- Element: Nickel-chromium (NiCr) resistance wire
Detailed content
- Insulation: High-purity magnesium oxide (MgO)
- Sheath: 316L stainless steel (electropolished)
- Power Rating: 1.2kW per zone (total 4.8kW for 4-zone)
- Voltage: 240V AC
- Temperature Range: Up to 800°C continuous
- Dimensions: 12.7mm diameter x 150mm length (standard)
Key Features:
- Fast heat-up rate and high thermal efficiency
- Uniform heat distribution along element length
- High dielectric strength ( > 5kV)
- Hermetically sealed to prevent contamination in vacuum
- Built-in thermocouple wells for temperature monitoring
Application Scenarios:
Integrated into AMAT heater pedestals, gas preheaters, and thermal process modules. Used in PVD, PECVD, ALD, and annealing processes requiring precise, high-temperature heating.
