Digital guide
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AMAT 1400-00206
Product Name: Optical Reference Sensor / Position Detector
Product Description: A non-contact optical sensor used for precise position detection of robot blades, wafer doors, and linear stages. Provides high-resolution, repeatable position feedback for motion control systems.
Technical Specifications:
- Type: Reflective photoelectric sensor
Detailed content
- Sensing Distance: 5–30mm (adjustable)
- Output: NPN/PNP digital signal (24V DC)
- Resolution: < 0.1mm
- Repeatability: ±0.02mm
- Environmental Rating: IP67 (dust & water resistant)
- Operating Temperature: 0°C to +70°C
Key Features:
- High-speed response ( < 1ms) for dynamic motion control
- Immune to ambient light and electromagnetic interference (EMI)
- Compact, rugged design for fab floor environment
- Easy calibration and alignment
- Long service life ( > 50,000 operating hours)
Application Scenarios:
Deployed in AMAT wafer handling robots (Centura, Producer), indexers, and loadlock chambers. Used for home position detection, blade presence sensing, and door position verification.
