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AMAT 0021-04643
Product Name: Dark Space Upper Shield / Plasma Confining Ring
Product Description: A specialized upper chamber shield that defines the “dark space” region above the plasma, preventing unwanted plasma interactions with the chamber lid and upper fixtures. It stabilizes plasma geometry and improves process uniformity.
Technical Specifications:
- Material: Ultra-high-purity aluminum alloy (6061-T6)
Detailed content
- Surface: Electropolished + anti-spatter coating
- Profile: Stepped design to create non-plasma volume
- Dimensional Accuracy: ±0.03mm for critical profiles
- Vacuum Compatibility: UHV, low outgassing
- Weight: Optimized for minimal thermal expansion
Key Features:
- Defines sharp plasma boundary for consistent etch/deposition
- Reduces macro-particle formation in upper chamber
- Minimizes heat loss to chamber lid
- Easy to remove and clean during preventive maintenance
- Compatible with high-power RF plasma environments
Application Scenarios:
Used in AMAT Centura DPS (Dielectric Plasma Source) etch chambers and PVD chambers. Critical for high-density plasma processes requiring stable, well-defined plasma volumes.
