Digital guide
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AMAT 0020-04257
Product Name: Wafer Lift Pin / Guide Assembly
Product Description: A precision ceramic lift pin assembly used to raise and lower wafers onto the electrostatic chuck (ESC) or heater pedestal. Provides non-contact, low-particle wafer handling during transfer cycles.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) or silicon carbide (SiC)
Detailed content
- Diameter: 6mm (standard), precision ground ±0.01mm
- Surface Finish: Polished to Ra < 0.2μm (non-slip, low particle)
- Length: Custom matched to chamber Z-height
- Wear Resistance: > 1 million lift cycles without degradation
- Mounting: Stainless steel ferrule with vacuum-compatible adhesive
Key Features:
- Ultra-smooth surface prevents wafer scratching or backside contamination
- High flexural strength resists breakage under wafer load
- Chemically inert to all process environments (plasma, temperature)
- Low thermal expansion maintains alignment during thermal cycling
- Minimal contact area reduces particle generation
Application Scenarios:
Used in all AMAT 200mm/300mm process platforms (Centura, Endura, Producer) for wafer handling in PVD, CVD, etch, and annealing processes.
