ZYGO ZMI-2002 8020-0211-1-J Precision Measurement System
- Core Measurement Capabilities:
- Measurement Axes: Dual-axis (X and Y) for simultaneous displacement and angle measurement.
- Resolution: <1 nm.
- Accuracy: ±0.1 µm.
- Measurement Range:
- X-axis: 50 mm
- Y-axis: 25 mm.