AMAT

You are here:
  1. Home
  2. AMAT
  3. Page 9

AMAT 3700-02829

Product Name: High-Temperature Perfluoroelastomer O-Ring
Product Description: A precision-molded sealing ring manufactured from high-grade perfluoroelastomer (FFKM/Kalrez), designed for ultra-high vacuum and extreme temperature sealing in aggressive process environments.
Technical Specifications:
  • Material: Kalrez 4079 (perfluoroelastomer)

AMAT 3400-01068

Product Name: Stainless Steel Flanged Spiral Pipe
Product Description: A precision-formed, corrugated stainless steel pipe with flanged ends, designed for flexible, high-vacuum fluid and gas transfer in semiconductor utility systems.
Technical Specifications:
  • Material: 316L Stainless Steel (electropolished)

AMAT 0195-10582

Product Name: AC Power Distribution Module
Product Description: A robust industrial power distribution unit that provides regulated, fused, and protected alternating current (AC) power to various sub-systems within a semiconductor manufacturing tool.
Technical Specifications:
  • Input Voltage: 208V AC, 3-phase, 50/60Hz

AMAT 0090-10396

Product Name: RF Filter Box Assembly
Product Description: A high-performance radio frequency (RF) filtering module designed to suppress electromagnetic interference (EMI) and noise, ensuring clean, stable RF power delivery to plasma process chambers.
Technical Specifications:
  • Frequency Range: 400kHz – 60MHz (broadband)

AMAT 0200-00071

Product Name: 200mm Extended Quartz Insulating Pipe
Product Description: A high-purity fused quartz pipe that provides electrical isolation and thermal insulation for chamber components, while maintaining vacuum integrity in 200mm semiconductor process chambers.
Technical Specifications:
  • Material: Synthetic fused silica (SiO₂, >99.998% purity)

AMAT 0200-01915

Product Name: Quartz Focus Ring
Product Description: A high-purity fused quartz component that surrounds the wafer pedestal, focusing plasma and process gases toward the wafer surface to enhance deposition uniformity and prevent edge effects.
Technical Specifications:
  • Material: Synthetic fused silica (SiO₂, >99.999% purity)

AMAT 0020-22950

Product Name: 13" Collimator Source Adapter

Product Description: A high-precision machined adapter plate that interfaces between the collimator source and the process chamber, ensuring accurate alignment and a vacuum-tight seal for uniform plasma distribution.

AMAT 0010-39189

Product Name: 300mm Wafer Lift Pin Assembly

Product Description: A precision mechanical assembly designed to vertically lift and position 300mm wafers within semiconductor process chambers, ensuring safe and accurate transfer between the robot blade and process pedestal.
Technical Specifications:
  • Material: 316L Stainless Steel (body), High-purity Alumina Ceramic (pin tip)

AMAT 3510-00244

Product Name: System Power Distribution Module
Product Description: A centralized power distribution unit that provides regulated, protected power to all sub-systems and modules within a semiconductor tool mainframe.
Technical Specifications:
  • Input Voltage: 208V AC, 3-phase, 50/60Hz

AMAT 0090-00524

Product Name: Precision Pressure Transducer Module
Product Description: A high-accuracy analog pressure sensor module for measuring absolute and gauge pressure in high-purity gas delivery and vacuum control systems.
Technical Specifications:
  • Pressure Range: 1 Torr to 1000 Torr (absolute)

AMAT 0224-43065

Product Name: Quartz Gas Distribution Showerhead
Product Description: A high-purity fused quartz component with precision-drilled orifices, designed for uniform distribution of process gases across the wafer surface in semiconductor deposition chambers.
Technical Specifications:
  • Material: Synthetic fused silica (SiO₂, >99.999% purity)

AMAT 0140-15214

Product Name: High-Voltage Interlock Cable Harness
Product Description: A safety-rated cable assembly designed for transmitting critical high-voltage interlock (HVIL) signals between chamber access doors, safety relays, and main control systems.
Technical Specifications:
  • Conductors: 18 AWG stranded tinned copper (6 cores)