AMAT 0140-15214
Product Name: High-Voltage Interlock Cable Harness
Product Description: A safety-rated cable assembly designed for transmitting critical high-voltage interlock (HVIL) signals between chamber access doors, safety relays, and main control systems.
Technical Specifications:
- Conductors: 18 AWG stranded tinned copper (6 cores)
Detailed content
- Insulation: Cross-linked polyethylene (XLPE), 600V rated
- Shielding: Full coverage tinned copper braid (95% coverage)
- Connector: Keyed MIL-DTL-38999 circular connectors
- Voltage Rating: 600V AC/DC
- Current Rating: 10A
- Temperature Range: -55°C to +125°C
- Length: 3.0 meters (customizable)
- Safety Rating: Cat. 3, PL d (ISO 13849-1)
Functional Features:
- Safety-rated construction for critical interlock circuits
- EMI/RFI shielding to prevent false triggers in high-interference areas
- Chemical-resistant jacket for compatibility with process environments
- High flex life for dynamic installations
- Keyed connectors to eliminate mis-wiring risks
Application Scenarios: Safety interlock systems for chamber doors, access panels, and high-voltage power supplies on PVD, CVD, and Etch semiconductor tools.







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