Digital guide
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AMAT 3510-00244
Product Name: System Power Distribution Module
Product Description: A centralized power distribution unit that provides regulated, protected power to all sub-systems and modules within a semiconductor tool mainframe.
Technical Specifications:
- Input Voltage: 208V AC, 3-phase, 50/60Hz
Detailed content
- Output Circuits: 12 isolated 24V DC outputs (10A each)
- Ripple & Noise: < 100mV
- Efficiency: > 90%
- Cooling: Forced-air cooling
- Protection: Over-voltage, over-current, over-temperature, short-circuit
- Communication: RS-232 for remote monitoring
- Dimensions: 19″ rack-mountable (3U)
- Operating Temperature: 0°C to +40°C
Functional Features:
- Active power factor correction (PFC)
- Individual output circuit breakers with status indication
- Remote on/off control and diagnostic feedback
- High MTBF (> 500,000 hours)
- Wide input voltage tolerance (±10%)
Application Scenarios: Primary power distribution for mainframe controllers, robot controllers, I/O cards, and sensor modules in AMAT 300mm wafer processing systems.
