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AMAT 03-81723-00

Product Name: Chamber Seal Adapter Flange
Product Description: Precision-machined metal flange used to create vacuum-tight connections between chamber segments, feedthroughs, and external components.
Technical Specifications:
  • Material: 316L electropolished stainless steel

AMAT 0040-38738

Product Name: Heater Jacket Assembly for Chamber Components
Product Description: Flexible heating assembly used to maintain controlled temperatures on gas lines, injectors, and chamber components to prevent condensation and process gas freezing.
Technical Specifications:
  • Heating Type: Resistive flexible heater mat

AMAT 0010-17039

Product Name: Analog Sensor Signal Conditioner
Product Description: Electronic module that amplifies, filters, and linearizes analog signals from pressure, temperature, and flow sensors for system control and monitoring.
Technical Specifications:
  • Input Range: 0–5V, 0–10V, 4–20mA

AMAT 0010-90811

Product Name: Digital Position Sensor Module
Product Description: Non-contact digital sensor used to detect linear or rotational position of moving components within semiconductor automation systems.
Technical Specifications:
  • Sensing Principle: Magnetic Hall-effect detection
  • Supply Voltage: 24V DC

AMAT 0120-93660

Product Name: Flow Control Solenoid Valve Manifold
Product Description: Integrated multi-station manifold assembly with solenoid valves for regulating process and purge gas flows in semiconductor gas delivery systems.
Technical Specifications:
  • Valve Configuration: 2-way normally closed solenoid valves

AMAT 0190-41535

Product Name: Servo Motor Drive Module
Product Description: Compact digital drive module for controlling precision servo motors used in wafer positioning, lift mechanisms, and automated chamber components.
Technical Specifications:
  • Input Voltage: 24V DC
  • Control Interface: Analog ±10V and digital pulse/direction signals

AMAT 0200-10176

Product Name: Quartz Focus Ring Assembly
Product Description: Contoured high-purity quartz ring that shapes gas distribution and plasma uniformity above the wafer, improving process consistency across the wafer surface.
Technical Specifications:
  • Material: Low-metal synthetic fused quartz

AMAT 0020-90099

Product Name: High-Temperature Ceramic Insulator Spacer
Product Description: Precision-machined ceramic component used to maintain fixed spacing between conductive assemblies while providing electrical insulation in high-temperature vacuum environments.
Technical Specifications:
  • Material: Boron nitride reinforced alumina ceramic composite

AMAT 0020-34335

Product Name: Ceramic Chamber Liner Insert
Product Description: High-purity alumina ceramic insert designed to line inner chamber walls, protecting structural components from plasma damage and minimizing cross-contamination during wafer processing.
Technical Specifications:
  • Material: 99.6% high-purity alumina ceramic (Al₂O₃)

AMAT 0020-08159

Product Name: Quartz Gas Distribution Nozzle
Product Description: High-purity fused quartz nozzle used for directional delivery of process gases in semiconductor deposition and etching chambers, ensuring uniform gas flow toward the wafer surface.
Technical Specifications:
  • Material: High-purity synthetic fused silica

AMAT 0020-37214

Product Name: High-Purity Alumina Ceramic Isolator Ring
Product Description: A precision-machined ceramic ring providing electrical isolation and thermal stability for high-voltage components in process chambers.
Technical Specifications:
  • Material: 99.8% high-purity alumina (Al₂O₃)

AMAT 0040-20100-01

Product Name: 11.3" TIW Source Magnet Assembly
Product Description: A high-performance permanent magnet assembly designed for the Target Ion Wafer (TIW) PVD source, generating a confined magnetic field for plasma control.
Technical Specifications:
  • Material: High-grade neodymium-iron-boron (NdFeB)