AMAT 0130-72336
- Product Name: AMAT 0130 - 72336 Semiconductor Process Chamber Heating Zone Insulation
- Product Introduction: In semiconductor process chambers, maintaining proper temperature distribution is essential for the success of various thermal - based processes. The heating zone insulation is used to minimize heat loss from the heating elements and ensure that the heat is directed towards the wafer, improving process efficiency and temperature uniformity.
- Technical Specifications:
- Material: Made from high - temperature - resistant and low - thermal - conductivity materials such as ceramic fibers, graphite felt, or refractory bricks.









