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AMAT 0200-10153

Product Name: Chamber Liner Assembly
Product Description: A protective cylindrical liner installed inside semiconductor processing chambers to shield the main chamber body from plasma exposure, chemical corrosion, and process byproduct accumulation. It preserves chamber integrity and simplifies maintenance.
Technical Specifications:
  • Material: High-purity quartz or anodized aluminum

AMAT 0200-05369

Product Name: Gas Distribution Nozzle Assembly
Product Description: A precision-machined component dedicated to uniform injection and distribution of process gases into semiconductor vacuum processing chambers. It stabilizes gas flow patterns to ensure consistent process results across the wafer surface.
Technical Specifications:
  • Material: 316L stainless steel with electropolished surface

AMAT 0200-35296

Product Name: Inner Gas Feed Plug Assembly
Product Description: A precision-engineered component for delivering process gases directly into semiconductor processing chambers. It ensures uniform gas distribution and maintains vacuum integrity.
Technical Specifications:
  • Material: High-purity 316L stainless steel

AMAT 0020-24411

Product Name: Ceramic Insulator Spacer Assembly
Product Description: A precision ceramic component providing electrical isolation and precise spacing between components in semiconductor vacuum chambers. It maintains proper alignment while preventing electrical arcing.
Technical Specifications:
  • Material: High-purity macor ceramic

AMAT 0100-09110

Product Name: Field Control Processor Module
Product Description: A high-performance embedded controller module designed for real-time control and monitoring of semiconductor manufacturing equipment. It serves as the primary interface between equipment and factory automation systems.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller

AMAT 0040-47677

Product Name: Chamber Bellows Assembly
Product Description: A flexible, vacuum-tight component enabling linear movement within semiconductor processing chambers while maintaining pressure integrity. It accommodates lift pins, gas lines, and other moving components.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0224-40643

Product Name: Chamber Top Panel Assembly
Product Description: A structural and functional component forming the upper section of semiconductor processing chambers. It provides mounting for process components and maintains vacuum integrity.
Technical Specifications:
  • Material: Anodized aluminum or 316L stainless steel

AMAT 0240-33168

Product Name: RF Match Network Assembly
Product Description: A high-performance impedance matching network designed for precise RF power delivery in semiconductor plasma processing equipment. It ensures maximum power transfer between the RF generator and process chamber.
Technical Specifications:
  • Frequency Range: 13.56 MHz (standard)

AMAT 0020-24719

Product Name: 200mm Aluminum Cover Ring Assembly
Product Description: A precision-machined aluminum component designed to surround and protect 200mm wafers during semiconductor processing. It ensures proper wafer positioning and prevents edge effects during deposition and etch processes.
Technical Specifications:
  • Material: High-purity aluminum (AL 233-3889-52)

AMAT 0021-09914

Product Name: Blocker Plate Assembly
Product Description: A precision-engineered metal component used to control gas flow and plasma distribution within semiconductor deposition and etch chambers. It optimizes process uniformity and protects critical chamber components.
Technical Specifications:
  • Material: High-grade aluminum or stainless steel

AMAT 1410-01130

Product Name: Exhaust Heater Assembly
Product Description: A precision heating unit designed to maintain optimal temperatures in semiconductor equipment exhaust systems, preventing condensation and ensuring consistent gas flow.
Technical Specifications:
  • Heating Element: Stainless steel sheathed resistance heater

AMAT 0021-21771

Product Name: Ceramic Isolator Ring Assembly
Product Description: A high-purity ceramic component engineered for electrical isolation and structural support within semiconductor vacuum processing chambers. It provides robust insulation between high-voltage components and grounded chamber structures.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic