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AMAT 0021-11110
Product Name: Ceramic Shield Assembly
Product Description: A high-performance ceramic component used to shield sensitive chamber parts from plasma bombardment, thermal stress, and chemical erosion in semiconductor processing environments. It provides electrical isolation and structural stability.
Technical Specifications:
- Material: High-purity alumina ceramic (Al₂O₃)
Detailed content
- Dielectric Strength: >20 kV/mm
- Maximum Operating Temperature: 1450°C
- Surface Finish: Ra < 0.6 μm
- Dimensional Stability: Low thermal expansion coefficient
- Vacuum Compatibility: UHV compliant with low outgassing
Functional Features:
- Excellent plasma and chemical resistance
- Superior electrical insulation performance
- High thermal shock resistance
- Non-contaminating material composition
- Precision-machined for exact fit and alignment
- Reduces particle generation during processing
Application Scenarios:
- RF plasma chamber components shielding
- Electrode and chuck protection
- High-voltage component isolation
- Vacuum feedthrough shielding
- Advanced semiconductor etch and deposition tools
