AMAT

You are here:
  1. Home
  2. AMAT
  3. Page 21

AMAT 0020-03398

  • Product Name: Ceramic Chamber Shield
  • Product Description: High-purity alumina ceramic shield for protecting chamber walls from plasma exposure in reactive ion etching processes.
  • Technical Specifications:
    • Material: 99.6% high-purity alumina (Al₂O₃)

AMAT 0020-03004

  • Product Name: Quartz Viewport Protector
  • Product Description: Fused quartz protective window for chamber viewports, shielding optical sensors and cameras from process plasma and contamination while maintaining optical transparency.
  • Technical Specifications:
    • Material: High-purity fused silica quartz

AMAT 0010-76136

  • Product Name: Wafer Lift HTHU Heater Assembly
  • Product Description: Heated wafer lift pin assembly with integrated heating elements, maintaining wafer temperature during transfer in high-temperature process modules.
  • Technical Specifications:
    • Wafer Size: 150mm (6") / 200mm (8")

AMAT 0010-70131

  • Product Name: Wafer Lift Pin Actuator Assembly
  • Product Description: Pneumatic actuator assembly for driving wafer lift pins, providing vertical motion to lift wafers off electrostatic chucks for robot transfer.
  • Technical Specifications:
    • Actuator Type: Double-acting pneumatic cylinder

AMAT 0010-09416

  • Product Name: Etch RF Match Assembly
  • Product Description: Automatic RF impedance matching network for P5000 Etch chambers. It optimizes power transfer between the RF generator and plasma load by adjusting impedance to minimize reflected power.
  • Technical Specifications:
    • Frequency: 13.56 MHz

AMAT 0020-30222

  • Product Name: Top Cover Handle Adapter
  • Product Description: Machined metal adapter plate for mounting chamber top cover handles, enabling safe lifting and removal of chamber lids during maintenance.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-55519

  • Product Name: Ceramic Isolator Washer
  • Product Description: High-purity ceramic washer providing electrical insulation and mechanical spacing in high-voltage sections of semiconductor process chambers.
  • Technical Specifications:
    • Material: 99.6% high-purity alumina (Al₂O₃)
    • Dimensions: 10mm OD × 5mm ID × 3mm thickness

AMAT AXF-600-423-5/8

  • Product Name: AXF Series Electromagnetic Flow Meter
  • Product Description: High-precision electromagnetic flow meter (Yokogawa ADMAG AXF) customized for Applied Materials, used to measure conductive fluid flow in ultra-pure water (UPW) and chemical delivery systems.
  • Technical Specifications:
    • Pipe Size: 5/8 inch (15 mm)

AMAT 7801-D-1222

  • Product Name: Versacontroller DI Board (Sink)
  • Product Description: Digital input (DI) interface board designed for the Applied Materials Versacontroller system. It processes and conditions digital signals from machine safety interlocks, sensors, and switches, providing reliable signal input to the main system controller.
  • Technical Specifications:
    • Form Factor: Proprietary PCB for Versacontroller chassis

AMAT 0021-03804

  • Product Name: Quartz Gas Injector Ring
  • Product Description: A high-purity fused quartz component that distributes process gases uniformly across the wafer surface in semiconductor deposition chambers.
  • Technical Specifications:
    • Material: High-purity Fused Silica Quartz (SiO₂ > 99.99%)

AMAT 0010-70279

  • Product Name: Wafer Lift Pin Assembly
  • Product Description: A precision linear actuator assembly used to lift wafers from the electrostatic chuck for robot pick-and-place operations in semiconductor process chambers.
  • Technical Specifications:
    • Pin Material: High-purity Alumina Ceramic (Al₂O₃)
    • Stroke Length: 25mm

AMAT 0010-37741

  • Product Name: High-Voltage (HV) Power Module
  • Product Description: A compact high-voltage power supply module designed to provide bias voltages for electrostatic chucks and electrode biasing in semiconductor chambers.
  • Technical Specifications:
    • Output Voltage: 0-5000V DC (adjustable)