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AMAT 0020-34731
- Product Name: RF/HV Feedthrough Mount Plate
- Product Description: Machined metal mounting plate designed to secure high-voltage (HV) and radio frequency (RF) feedthroughs to semiconductor process chamber walls. It provides a stable, grounded interface with precision alignment for reliable electrical performance.
- Technical Specifications:
- Material: 316L Stainless Steel
Detailed content
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- Dimensions: 150mm × 120mm × 12mm
- Mounting Holes: 4 × 8mm clearance holes (100mm × 70mm pattern)
- Feedthrough Cutout: 50mm diameter precision bore
- Surface Finish: Ra ≤ 1.6 μm (electropolished)
- Vacuum Compatibility: UHV-rated
- Weight: 1.8 kg
- Functional Features:
- Precision machining for exact feedthrough alignment and sealing
- High structural rigidity to prevent vibration and misalignment
- Vacuum-compatible, non-outgassing construction
- Corrosion-resistant 316L stainless steel for process compatibility
- Grounded design for effective RF shielding and noise reduction
- Easy installation with standard chamber interface
- Applications: Mounting for RF power feedthroughs, DC bias feedthroughs, and high-voltage electrode connections in PVD, CVD, and Etch chambers; compatible with Centura and Endura platforms.
