Digital guide
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AMAT 0090-20042
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Product Name: Pneumatic Manifold Kit for MFC
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Product Description: Complete pneumatic manifold kit designed for precise control of gas delivery to mass flow controllers (MFCs) in semiconductor gas distribution systems. It includes all necessary fittings, valves, and tubing for reliable gas line operation.
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Technical Specifications:
- Configuration: 2-gas output manifold
Detailed content
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- Valve Type: Pneumatically actuated, normally closed
- Operating Pressure: 4–7 bar (58–100 PSI)
- Wetted Materials: 316L Stainless Steel, PTFE
- Connections: 1/4″ VCR face-seal fittings
- Leak Rate: <1 × 10⁻⁹ atm-cc/s He
- Temperature Range: -10°C to +60°C
- Components: Manifold block, 2 × isolation valves, pressure gauge, tubing, fittings
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Functional Features:
- Ultra-high purity, non-contaminating gas delivery
- Zero dead-leg design to minimize gas residence time
- Fast response pneumatic valves for precise gas switching
- Integrated pressure monitoring for system diagnostics
- Pre-assembled and leak-tested for simplified installation
- Compact design for dense gas panel integration
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Applications: Gas distribution control for MFCs in PVD, CVD, and Etch process gas panels; compatible with Centura, Endura, and Producer platforms for ultra-high purity process gas delivery.
