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AMAT 0030-20002

Product Name: Precision Vacuum Feedthrough Assembly (Electrical & Signal)
Product Description: A hermetically sealed electrical feedthrough designed to transmit power, signals, and control voltages across the vacuum chamber wall while maintaining ultra-high vacuum (UHV) integrity. It provides isolated electrical pathways for internal sensors, heaters, and actuators.
Technical Specifications:
  • Material: 316L stainless steel body, alumina ceramic insulation

AMAT 0240-71275

Product Name: Serial Communication / Interface PCB Module
Product Description: An industrial-grade printed circuit board module that manages serial communication, data acquisition, and device control between the main system controller and peripheral equipment modules.
Technical Specifications:
  • Processor: 32-bit industrial microcontroller

AMAT 0020-40683

Product Name: Gas Distribution / Showerhead Insert Component
Product Description: A precision-engineered insert for gas showerhead assemblies that ensures uniform distribution of process gases across the wafer surface. It plays a critical role in achieving thin film uniformity and process consistency.
Technical Specifications:
  • Material: High-purity aluminum or anodized aluminum alloy

AMAT 0242-85548

Product Name: He Dump / Cooling System Retrofit Kit
Product Description: A comprehensive upgrade kit designed to retrofit existing helium cooling systems for improved thermal control efficiency. It includes upgraded components to enhance heat extraction from wafer pedestals.
Technical Specifications:
  • Kit Contents: Upgraded heat exchanger, precision flow control valve, pressure transducers, high-purity tubing, and installation hardware

AMAT 0041-93175

Product Name: Turbo Pump Interface / Adapter Flange
Product Description: A precision-machined transition flange that provides a vacuum-tight connection between the process chamber and high-speed turbomolecular vacuum pump. It ensures alignment, structural support, and maintains UHV integrity.
Technical Specifications:
  • Material: Forged aluminum alloy 6061-T6 / 316L stainless steel

AMAT 0140-36112

Product Name: AC Power Distribution Cable Assembly – Ozone Generator

Product Description: A heavy-duty, industrial-grade power cable assembly designed to safely deliver alternating current from the main power distribution unit to the ozone generator module in semiconductor wafer cleaning systems.
Technical Specifications:
  • Cable Type: Multi-conductor, shielded power cable

AMAT 0020-48304

Product Name: Process Shield / Chamber Liner Assembly
Product Description: A consumable protective liner installed within the process chamber to shield the chamber wall from plasma bombardment, chemical corrosion, and deposition of process byproducts. It optimizes gas flow and extends chamber maintenance intervals.
Technical Specifications:
  • Material: High-purity, plasma-sprayed coated aluminum or SiC composite

AMAT 0021-84531

Product Name: High-Purity Ceramic Insulator / Isolation Ring
Product Description: A precision-engineered ceramic component providing electrical isolation, thermal stability, and mechanical support within high-power RF and plasma environments. It prevents arcing, isolates high-voltage components, and maintains structural alignment.
Technical Specifications:
  • Material: Ultra-high-purity (99.9%) alumina (Al₂O₃) ceramic

AMAT 0010-22012

Product Name: Electrostatic Chuck (ESC) Pedestal Assembly
Product Description: A high-performance wafer clamping and heating pedestal integrating electrostatic chucking technology with precise thermal control. It provides non-contact wafer clamping, uniform heating, and RF bias delivery for advanced semiconductor processes.
Technical Specifications:
  • Wafer Size: Compatible with 200mm wafers

AMAT 0010-00750

Product Name: Bolt-Down Cover / Chamber Top Plate Assembly

Product Description: A robust, precision-machined top cover assembly engineered to secure and seal process chamber environments. It serves as a structural barrier and mounting platform for internal fixtures, ensuring vacuum integrity and process stability.
Technical Specifications:
  • Material: Solid 316L stainless steel or high-grade aluminum alloy

AMAT 0010-09822

Product Name: Precision Machined Chamber Lid / Bolt-Down Cover Assembly
Product Description: A high-precision, heavy-duty structural cover assembly designed to seal the top opening of semiconductor process chambers. It provides a vacuum-tight seal, structural integrity, and mounting interface for internal components while maintaining ultra-clean conditions.
Technical Specifications:
  • Material: High-strength, low-outgassing 6061-T6 aluminum alloy

AMAT 0100-70028

Product Name: Embedded Control PCB & Field I/O Processor Module
Product Description: An industrial‑grade embedded control circuit board and subsystem processor module, used for real‑time control, data acquisition, motion control and communication management of various actuators, sensors and execution components in semiconductor equipment.
Technical Specifications:
  • Processor: High‑performance embedded industrial processor