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AMAT 0010-39912 Wafer Handling Robot End Effector

Product Overview: The AMAT 0010-39912 is a precision-engineered wafer handling robot end effector designed for Applied Materials automated wafer handling systems. It provides secure, non-contact wafer gripping and transfer using vacuum suction, ensuring zero wafer damage and contamination. This end effector features a lightweight, rigid design, advanced vacuum control, and compatibility with 200mm/300mm wafers, making it critical for high-speed, high-volume semiconductor manufacturing.
Technical Specifications:
  • Material: Carbon fiber composite body, with high-purity ceramic suction cups.

AMAT 0020-09636 Product Name: Quartz Isolator Sleeve

Product Overview: The AMAT 0020-09636 is a high-purity quartz isolator sleeve designed for electrical insulation and thermal protection in Applied Materials semiconductor equipment. It insulates high-voltage components (electrodes, RF feedthroughs, sensor wiring) from chamber bodies and other conductive parts, preventing electrical arcing and ensuring safe operation in high-temperature, high-vacuum environments. Quartz’s exceptional electrical insulation, thermal stability, and plasma transparency make this sleeve ideal for plasma processing applications.
Technical Specifications:
  • Material: High-purity fused quartz (SiO₂), purity ≥ 99.999%, with zero metallic impurities.

AMAT 3310-00282 Wafer Edge Ring Assembly

Product Overview: The AMAT 3310-00282 is a precision-engineered wafer edge ring assembly designed for Applied Materials semiconductor processing equipment. It surrounds the wafer perimeter during processing, ensuring uniform plasma distribution across the wafer surface, protecting the wafer edge from excessive etching or deposition, and preventing process contamination. Manufactured from high-purity ceramic or silicon carbide, this edge ring delivers exceptional plasma resistance, thermal stability, and dimensional accuracy for advanced wafer processing.
Technical Specifications:
  • Material: 99.9% silicon carbide (SiC) or high-purity alumina (Al₂O₃), customer-specified.

AMAT 0190-70076 High-Precision RF Match Network Controller

Product Overview: The AMAT 0190-70076 is a high-performance RF match network controller designed for Applied Materials plasma processing equipment. It provides real-time control and optimization of RF power delivery to plasma chambers, ensuring maximum power transfer efficiency, stable plasma ignition, and consistent process performance. This controller features advanced digital signal processing (DSP) technology, fast response times, and seamless integration with AMAT’s equipment control systems, making it critical for plasma etching and deposition processes.
Technical Specifications:
  • Frequency Range: 13.56 MHz (standard), compatible with 2 MHz, 27 MHz, and 60 MHz RF generators.

AMAT 0050-41308 High-Purity Gas Line Weldment Assembly

Product Overview: The AMAT 0050-41308 is a precision-engineered gas line weldment assembly designed for the ultra-high-purity gas delivery systems of Applied Materials semiconductor equipment. It facilitates the safe, leak-tight transport of process gases (inert, reactive, corrosive) between gas cabinets, mass flow controllers, and process chambers. Manufactured with precision welding and electropolishing, this assembly ensures zero contamination, minimal dead volume, and maximum gas purity—critical for advanced semiconductor manufacturing processes.
Technical Specifications:
  • Material: 316L VAR (Vacuum Arc Remelted) stainless steel, electropolished to Ra ≤ 0.05μm.

AMAT 0020-25658 Vespel Centering Clamp Ring

Product Overview: The AMAT 0020-25658 is a high-performance centering clamp ring manufactured from Vespel (polyimide) material, designed exclusively for Applied Materials semiconductor equipment. It serves as a precision centering and clamping component for process chamber inserts, gas distribution plates, and wafer support assemblies, ensuring precise alignment and secure fastening in high-temperature, high-vacuum environments. Vespel’s unique properties make this clamp ring resistant to thermal expansion, chemical attack, and plasma erosion, delivering long-term reliability in demanding fab conditions.
Technical Specifications:
  • Material: Vespel SP-21 polyimide, reinforced with carbon fiber for enhanced mechanical strength.

AMAT 0020-30917 Precision Ceramic Lift Pin Assembly

Product Overview: The AMAT 0020-30917 is a high-precision ceramic lift pin assembly engineered for Applied Materials semiconductor processing equipment. It is designed to safely lift, support, and position wafers within process chambers, load locks, and wafer handling systems, ensuring zero-contact, scratch-free handling of delicate semiconductor wafers. Manufactured from ultra-high-purity ceramic materials, this assembly delivers exceptional mechanical stability, thermal resistance, and plasma compatibility, making it a critical component for maintaining wafer integrity and process uniformity in advanced semiconductor manufacturing. Technical Specifications:
  • Material: 99.99% high-purity alumina (Al₂O₃) ceramic, offering extreme hardness (9 Mohs) and thermal stability.
  • Dimensions: Length 60mm, diameter 3.2mm, with a precision-machined rounded tip (radius 1.2mm) to prevent wafer damage.

AMAT 0020-87594 UPA Front Bracket

Product Overview: The AMAT 0020-87594 is a precision UPA front bracket specifically designed for the 300mm Reflexion LK wafer handling system of Applied Materials semiconductor equipment. It serves as a structural support component, securing critical parts of the wafer handling mechanism, including the robot arm and end effector assembly. This bracket is manufactured from high-strength materials with precise machining, ensuring structural stability, alignment, and compatibility with the Reflexion LK system. It is a critical component for maintaining the precision and reliability of the wafer handling system, ensuring damage-free wafer transfer and consistent operation in high-volume semiconductor production.
Technical Specifications:
- Material Composition: High-strength 6061-T6 aluminum alloy, offering a tensile strength of 310 MPa and excellent corrosion resistance.

AMAT 0240-20067 Ceramic Heater Assembly

Product Overview: The AMAT 0240-20067 is a high-performance ceramic heater assembly designed for use in Applied Materials semiconductor processing equipment. It provides precise, uniform heating for process chambers, wafers, and other critical components, ensuring optimal temperature conditions for semiconductor manufacturing processes such as CVD, PVD, and thermal annealing. This heater assembly is engineered with high-purity ceramic materials and advanced heating elements, offering exceptional thermal stability, uniform heat distribution, and resistance to plasma and chemical attack. It is a critical component for maintaining process consistency and wafer quality.
Technical Specifications:
- Material Composition: Heater core made of high-purity alumina (Al₂O₃) ceramic (99.99% purity), with a tungsten heating element embedded within the ceramic.
- Dimensions: Diameter 300mm, thickness 15mm, designed for 300mm wafer processing.
- Temperature Range: Operating temperature: 0-800°C, with a maximum temperature of 1000°C for short-term operation.

AMAT 7100-6443-01C High-Voltage Power Supply Unit

Product Overview: The AMAT 7100-6443-01C is a high-performance high-voltage power supply unit designed exclusively for Applied Materials semiconductor equipment. It provides stable, precise high-voltage power to critical components such as ion sources, electrostatic chucks, and plasma generators, enabling the efficient operation of semiconductor manufacturing processes. This power supply unit is engineered with advanced voltage regulation technology and rugged construction to withstand harsh industrial environments, ensuring reliable performance and seamless integration with AMAT’s equipment control systems. It is a critical component for maintaining process quality and efficiency in high-volume semiconductor production.
Technical Specifications:
- Output Voltage: 0-10 kV (adjustable), with a voltage stability of ±0.1% of set value over 24 hours.
- Output Current: 0-100 mA (continuous wave), with a current stability of ±0.5% of set value.
- Input Power: 220V AC (single-phase), 50/60 Hz, power factor ≥ 0.95.

AMAT 0021-23550 Precision Chamber Gasket

Product Overview: The AMAT 0021-23550 is a high-precision chamber gasket designed for use in the process chambers of Applied Materials semiconductor equipment. It creates a leak-tight seal between chamber components, such as chamber lids, flanges, and door assemblies, maintaining the ultra-high vacuum environment required for semiconductor processing. This gasket is manufactured from high-performance materials, ensuring exceptional air tightness, durability, and compatibility with harsh process gases and high temperatures. It is a critical component for preventing air leakage and contamination, ensuring the purity and integrity of the process environment.
Technical Specifications: - Material Composition: High-purity copper (99.99%) with a gold plating (thickness 5 μm) for enhanced corrosion resistance and sealing performance. - Dimensions: Outer diameter 200mm, inner diameter 180mm, thickness 2mm, compatible with AMAT’s standard chamber flanges.

AMAT 0020-06338 Ceramic Insulator Sleeve

Product Overview: The AMAT 0020-06338 is a high-performance ceramic insulator sleeve designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and thermal barrier for electrical components such as wires, cables, and electrodes, ensuring safe and reliable operation in high-voltage, high-temperature environments. This sleeve is manufactured from advanced ceramic materials, offering excellent electrical insulation, thermal stability, and plasma resistance. It is a critical component for preventing electrical arcing, protecting sensitive equipment components, and maintaining the integrity of the equipment’s electrical system.
Technical Specifications: - Material Composition: High-purity aluminum nitride (AlN) ceramic, offering excellent electrical insulation and thermal conductivity. - Dimensions: Outer diameter 18mm, inner diameter 12mm, length 40mm, with a surface roughness ≤ 0.1 μm.