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AMAT 0021-89703 Precision Metal Fastener
Product Overview: The AMAT 0021-89703 is a high-precision metal fastener designed for use in Applied Materials semiconductor equipment. It is used to securely fasten critical components such as chamber liners, sensors, electrodes, and control modules, ensuring structural stability and alignment in high-vacuum, high-temperature environments. This fastener is manufactured from high-strength, corrosion-resistant materials with precise machining, meeting AMAT’s strict performance standards. It is a key component for maintaining equipment integrity, preventing component displacement, and ensuring reliable operation in harsh fab environments.
Technical Specifications: – Material Composition: Heat-treated 17-4 PH stainless steel, offering a tensile strength of 1100 MPa and excellent corrosion resistance. – Fastener Type: Socket head cap screw with a hexagonal drive, designed for secure tightening and easy maintenance.
Detailed content
– Dimensional Specifications: Thread size M4×0.7, length 12mm, head diameter 8mm, with a socket size of 2.5mm. – Dimensional Tolerance: ±0.005mm for thread pitch and ±0.01mm for overall length, ensuring precise fit with mating components. – Surface Treatment: Passivated finish with a clear coating, enhancing corrosion resistance and reducing particle generation. – Operating Environment: Suitable for high-vacuum conditions (base pressure ≤ 1×10⁻⁸ Pa) and operating temperatures ranging from -30°C to 200°C. – Load Capacity: Maximum tensile load of 4000 N, ensuring secure fastening of heavy components. – Certification: Complies with ISO 9001 quality standards, SEMI S2/S8 safety guidelines, and DIN 912 fastener standards.
Functional Features: – Provides secure, vibration-resistant fastening of critical equipment components, preventing displacement during high-speed operation or thermal cycling. – Resists corrosion and oxidation in harsh fab environments, including exposure to plasma, process gases, and cleaning chemicals. – Ensures precise alignment of components, which is critical for maintaining process uniformity and equipment performance. – Compatible with AMAT’s standard tooling, simplifying installation and maintenance procedures. – Withstands high temperatures without losing structural integrity, ensuring long-term reliability. – Features a low-profile head design, fitting into tight spaces within process chambers and equipment modules. – Prevents particle generation, with a smooth surface finish that minimizes dust accumulation.
Application Scenarios: – Used in AMAT’s process chambers to fasten liners, electrodes, and sensor mounts. – Installed in vacuum system components, including turbomolecular pumps and vacuum flanges. – Applied in wafer handling systems to secure robotic arms, wafer carriers, and lift mechanisms. – Suitable for 200mm and 300mm wafer manufacturing lines, where equipment stability and precision are critical. – Ideal for high-volume production fabs, where equipment uptime and maintenance efficiency are essential. – Used in research and development equipment for securing custom components during process testing.
