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AMAT 0010-19228 Wafer Handling Robot Arm Assembly

Product Overview: The AMAT 0010-19228 is a precision wafer handling robot arm assembly designed exclusively for Applied Materials semiconductor equipment. It is responsible for the automated picking, placing, and transferring of wafers between equipment modules (load locks, process chambers, inspection stations) in a semiconductor fab. This robot arm is engineered with lightweight, high-rigidity materials and advanced motion control technology to ensure minimal wafer damage, high handling efficiency, and compatibility with cleanroom environments. It is a critical component for enabling high-volume, automated semiconductor manufacturing.
Technical Specifications: - Material Composition: Arm body made of carbon fiber composite, offering lightweight (weight: 0.8kg) and high rigidity (modulus of elasticity: 230 GPa). - Wafer Compatibility: Supports 200mm and 300mm wafers, with an adjustable end effector to accommodate different wafer sizes and thicknesses. - Positioning Accuracy: ±0.03mm (repeatability: ±0.01mm), ensuring precise wafer placement and alignment.

AMAT 0021-89703 Precision Metal Fastener

Product Overview: The AMAT 0021-89703 is a high-precision metal fastener designed for use in Applied Materials semiconductor equipment. It is used to securely fasten critical components such as chamber liners, sensors, electrodes, and control modules, ensuring structural stability and alignment in high-vacuum, high-temperature environments. This fastener is manufactured from high-strength, corrosion-resistant materials with precise machining, meeting AMAT’s strict performance standards. It is a key component for maintaining equipment integrity, preventing component displacement, and ensuring reliable operation in harsh fab environments.
Technical Specifications: - Material Composition: Heat-treated 17-4 PH stainless steel, offering a tensile strength of 1100 MPa and excellent corrosion resistance. - Fastener Type: Socket head cap screw with a hexagonal drive, designed for secure tightening and easy maintenance.

AMAT 0020-30672 Ceramic Wafer Lift Pin

Product Overview: The AMAT 0020-30672 is a precision ceramic wafer lift pin designed for use in Applied Materials semiconductor processing equipment. It is responsible for lifting and positioning wafers within process chambers, load locks, and wafer handling systems, ensuring damage-free handling and precise alignment. This lift pin is manufactured from high-purity ceramic materials, offering exceptional hardness, thermal stability, and plasma resistance. It is a critical component for maintaining wafer integrity, preventing scratches or contamination, and ensuring consistent process performance in high-volume semiconductor manufacturing.
Technical Specifications: - Material Composition: High-purity alumina (Al₂O₃) ceramic with a purity of 99.99%, providing excellent mechanical strength and thermal stability. - Dimensions: Length of 50mm, diameter of 3mm, with a rounded tip (radius of 1mm) to prevent wafer damage.

AMAT 0040-00290 Precision O-Ring Seal

Product Overview: The AMAT 0040-00290 is a precision O-ring seal designed exclusively for Applied Materials semiconductor equipment. It serves as a critical sealing component in vacuum systems, gas delivery lines, and process chambers, creating a leak-tight barrier to prevent air leakage, gas contamination, and pressure loss. This O-ring is manufactured from high-performance elastomers engineered to withstand the harsh conditions of semiconductor fabs, including high temperatures, vacuum environments, and exposure to reactive process gases. It is a key component for maintaining the integrity of the process environment, ensuring consistent performance and reducing equipment downtime.
Technical Specifications: - Material Composition: Fluorocarbon (FPM/Viton) elastomer with a shore hardness of 75 durometer (A), offering excellent chemical resistance and thermal stability.

AMAT 0190-08389 High-Precision Temperature Sensor Assembly

Product Overview: The AMAT 0190-08389 is a high-precision temperature sensor assembly specifically engineered for Applied Materials semiconductor processing equipment. It is designed to provide accurate, real-time temperature monitoring of critical components within process chambers, wafer handling systems, and heating modules. This sensor assembly leverages advanced thermocouple technology combined with rugged packaging to withstand the harsh operating conditions of semiconductor fabs, including high temperatures, plasma exposure, and chemical corrosion. It serves as a critical component for maintaining process stability, preventing component overheating, and ensuring consistent wafer quality throughout manufacturing operations.
Technical Specifications: - Sensor Type: K-type thermocouple with a precision-grade sensing element for reliable temperature detection.

AMAT 0020-04541 Precision Ceramic Insulator Washer

Product Overview: The AMAT 0020-04541 is a precision ceramic insulator washer designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and mechanical spacer between metal components, ensuring electrical isolation and precise alignment. This washer is manufactured from high-purity ceramic materials, offering excellent electrical insulation, high-temperature resistance, and corrosion resistance. It is a critical component for maintaining the integrity of the equipment’s electrical and mechanical systems, preventing electrical short circuits and ensuring proper component alignment.
Technical Specifications: - Material Composition: High-purity alumina (Al₂O₃) ceramic with a purity of 99.99%, offering excellent electrical insulation and mechanical strength. - Dimensions: Outer diameter 15mm, inner diameter 8mm, thickness 2mm, with a surface roughness ≤ 0.1 μm.

AMAT 0200-10163 SiN Isolator for Enhanced Pumping Lid

Product Overview: The AMAT 0200-10163 is a silicon nitride (SiN) isolator designed specifically for the enhanced pumping lid (DXZ) of Applied Materials semiconductor processing equipment. It serves as an electrical insulator and thermal barrier, ensuring the safe and efficient operation of the pumping lid system. This isolator is manufactured from high-purity SiN ceramic, offering exceptional electrical insulation, high-temperature resistance, and plasma erosion resistance. It is a critical component for maintaining the integrity of the enhanced pumping lid, enabling efficient vacuum pumping and process control.
Technical Specifications: - Material Composition: High-purity silicon nitride (SiN) ceramic with a purity of 99.9%, offering excellent mechanical strength and thermal stability. - Dimensions: Outer diameter 120mm, inner diameter 100mm, thickness 8mm, with a surface roughness ≤ 0.2 μm.

AMAT 0022-94001 Ceramic Insulator Bushing

Product Overview: The AMAT 0022-94001 is a high-performance ceramic insulator bushing designed for use in Applied Materials semiconductor equipment. It serves as an electrical insulator and mechanical support for electrical components such as wires, cables, and electrodes, ensuring safe and reliable operation in high-voltage, high-temperature environments. This bushing is manufactured from advanced ceramic materials, offering excellent electrical insulation, thermal stability, and plasma resistance. It is a critical component for preventing electrical arcing and ensuring the integrity of the equipment’s electrical system.
Technical Specifications: - Material Composition: High-purity aluminum nitride (AlN) ceramic, offering excellent electrical insulation and thermal conductivity. - Dimensions: Outer diameter 20mm, inner diameter 10mm, length 50mm, with a surface roughness ≤ 0.1 μm. - Electrical Insulation: Volume resistivity ≥ 1×10¹⁵ Ω·cm at 25°C, ensuring effective electrical isolation.

AMAT 0040-76429 Tall Manifold

Product Overview: The AMAT 0040-76429 is a tall manifold (OTB, T1) designed exclusively for Applied Materials semiconductor equipment. It is a critical component in the gas delivery system, responsible for the distribution and regulation of process gases to the process chamber. This manifold is engineered with high-purity materials and precision machining to ensure minimal gas adsorption, particle generation, and leakage, making it ideal for the strict requirements of semiconductor manufacturing. It features a tall design to accommodate specific equipment configurations, providing seamless integration with AMAT’s gas delivery systems.
Technical Specifications: - Material Composition: High-purity 316L stainless steel with an electropolished internal surface (surface roughness ≤ 0.1 μm) to minimize gas adsorption and particle generation. - Design Type: Tall manifold (OTB, T1), with a height of 200mm and a diameter of 100mm, designed for specific AMAT equipment configurations.

AMAT 0040-43978 Upper Chamber Liner

Product Overview: The AMAT 0040-43978 is a precision upper chamber liner designed for use in the process chambers of Applied Materials semiconductor equipment. It serves as a protective barrier between the chamber body and the harsh process environment, preventing damage from plasma erosion, chemical attack, and high temperatures. This liner is manufactured from high-performance materials with precise machining, ensuring a perfect fit within the chamber and maintaining the integrity of the process environment. It is a critical component for extending the service life of the process chamber and ensuring consistent process performance.
Technical Specifications: - Material Composition: High-purity aluminum oxide (Al₂O₃) ceramic or silicon carbide (SiC), selected for its excellent plasma resistance and thermal stability. - Dimensions: Outer diameter 300mm, inner diameter 280mm, height 150mm, with a surface roughness ≤ 0.2 μm. - Dimensional Tolerance: ±0.01mm, ensuring precise fit within the process chamber.

AMAT 0021-25078 Precision Vacuum Seal Gasket

Product Overview: The AMAT 0021-25078 is a high-precision vacuum seal gasket designed for use in the vacuum subsystems of Applied Materials semiconductor equipment. It is responsible for maintaining the ultra-high vacuum environment required for semiconductor processing by creating a leak-tight seal between vacuum chamber flanges and other components. This gasket is manufactured from high-performance materials, ensuring exceptional air tightness, durability, and compatibility with harsh process gases and high temperatures. It is a critical component for preventing air leakage and contamination, ensuring the purity and integrity of the vacuum environment.
Technical Specifications: - Material Composition: High-purity copper (99.99%) with a nickel plating (thickness 5-10 μm) for enhanced corrosion resistance and sealing performance. - Dimensions: Outer diameter 80mm, inner diameter 70mm, thickness 1.5mm, compatible with CF (ConFlat) flanges. - Vacuum Rating: Ultra-high vacuum (UHV) with a leak rate ≤ 1×10⁻¹² Pa·m³/s (He), ensuring minimal air leakage.

AMAT 0021-12737 Chamber Insulator Ring

Product Overview: The AMAT 0021-12737 is a high-performance chamber insulator ring designed for use in the process chambers of Applied Materials semiconductor equipment. It serves as an electrical insulator and thermal barrier, separating high-voltage components from the chamber body and preventing heat transfer between different chamber zones. This insulator ring is manufactured from advanced ceramic materials, ensuring excellent electrical insulation, high-temperature resistance, and plasma erosion resistance. It is a critical component for maintaining the integrity of the process chamber, ensuring safe operation and consistent process performance.
Technical Specifications: - Material Composition: High-purity alumina (Al₂O₃) ceramic with a purity of 99.99%, offering excellent electrical insulation and thermal stability. - Dimensions: Outer diameter 150mm, inner diameter 120mm, thickness 10mm, with a surface roughness ≤ 0.2 μm. - Electrical Insulation: Volume resistivity ≥ 1×10¹⁴ Ω·cm at 25°C, ensuring effective electrical isolation between high-voltage components.