AMAT

You are here:
  1. Home
  2. AMAT
  3. Page 63

AMAT 0100-90485

Product Name: Field Control Processor Module
Product Introduction: A high-performance field control processor module designed for real-time control and monitoring of semiconductor manufacturing equipment subsystems.
Technical Specifications:
  • Memory: 16 MB SDRAM, 32 MB Flash memory

AMAT 0270-03775

Product Name: Single Air Bearing Hose Assembly
Product Introduction: A specialized air bearing assembly with hose integration for AMAT Endura 300mm semiconductor processing systems.
Technical Specifications:
  • Application: Single air bearing for 300mm wafer handling systems

AMAT 0021-15497

Product Name: Ceramic/Quartz Isolator Component
Product Introduction: A high-performance ceramic or quartz isolator used for electrical isolation in semiconductor process chambers.
Technical Specifications:
  • Material: High-purity ceramic or fused quartz

AMAT 0022-77579

Product Name: Process Chamber Ring/Shield Component
Product Introduction: A specialized ring or shield component used in semiconductor process chambers to control process uniformity.
Technical Specifications:
  • Material: High-purity ceramic, quartz, or silicon carbide

AMAT 0021-21851

Product Name: Chamber Component/Mechanical Assembly
Product Introduction: A mechanical component or assembly used in the operation of semiconductor process chambers.
Technical Specifications:
  • Material: High-grade aluminum, stainless steel, or engineered polymer

AMAT 0050-36463

Product Name: Vacuum Fitting/Adapter Component
Product Introduction: A precision-engineered vacuum fitting or adapter used in gas delivery and vacuum systems of semiconductor manufacturing tools.
Technical Specifications:
  • Material: 316L stainless steel or other high-purity alloy

AMAT 0021-21799

Product Name: Process Chamber Shield/Isolator Component
Product Introduction: A specialized shield or isolator component used within semiconductor process chambers to protect sensitive elements.
Technical Specifications:
  • Material: High-purity ceramic, quartz, or metal alloy

AMAT 0040-41326

Product Name: Chamber Body/Chamber Component
Product Introduction: A critical structural component forming part of the process chamber in AMAT semiconductor manufacturing equipment.
Technical Specifications:
  • Material: High-grade aluminum alloy or stainless steel

AMAT 0020-26217

Product Name: Ceramic/Quartz Process Chamber Component
Product Introduction: A specialized ceramic or quartz component used as an insulator or shield in semiconductor process chambers.
Technical Specifications:
  • Material: High-purity ceramic or fused quartz

AMAT 0041-28765

Product Name: Insulator Component (RF Bias Application)
Product Introduction: A high-performance electrical insulator designed for RF bias applications in HDPCVD (High-Density Plasma Chemical Vapor Deposition) systems.
Technical Specifications:
  • Material: High-purity ceramic or advanced dielectric material

AMAT AFC550

Product Name: AFC550 Mass Flow Controller (MFC)
Product Introduction: A precision gas flow control device designed for semiconductor manufacturing processes, providing accurate regulation of process gas flow rates.
Technical Specifications:
  • Flow Rate Range: 6–300 cc/min (hydrogen), 20–1000 sccm (nitrogen), up to 10 SLPM (other gases)

AMAT 0100-9066

Product Name: Analog I/O Interface Module Assembly
Product Description: A high-performance analog I/O interface module assembly designed for precise signal acquisition and control in semiconductor manufacturing equipment.
Technical Specifications:
  • Input Voltage: 24V DC ±10%