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AMAT 0090-08927

Product Name: Advanced RF Matching Network PCB
Product Introduction: A specialized printed circuit board assembly designed for RF matching networks in semiconductor plasma process chambers, optimizing power transfer and plasma stability.
Technical Specifications:
  • Frequency Range: Optimized for 13.56 MHz semiconductor RF standards

AMAT 0090-00560

Product Name: Precision Motion Control Interface PCB
Product Introduction: A high-performance printed circuit board assembly designed for interfacing motion control systems with semiconductor manufacturing equipment, enabling precise coordination of wafer handling and positioning.
Technical Specifications:
  • Input Voltage: 24V DC industrial power supply

AMAT 0041-09027

Product Name: High-Purity Process Gas Line Assembly
Product Introduction: A precision-fabricated gas line assembly designed for semiconductor process gas delivery systems, ensuring clean, contamination-free gas transport to process chambers.
Technical Specifications:
  • Material: High-purity 316L electropolished stainless steel

AMAT 0040-45518

Product Name: Precision Chamber Seal Assembly
Product Introduction: A high-performance seal assembly engineered for semiconductor process chambers, providing reliable vacuum sealing and structural integrity in demanding manufacturing environments.
Technical Specifications:
  • Seal Material: High-performance Viton fluoroelastomer

AMAT 0040-39883

Product Name: WXZ CVD Chamber Dual Feedthrough Assembly
Product Introduction: A precision-engineered dual feedthrough assembly designed for AMAT Centura WXZ CVD process chambers, enabling reliable electrical and fluid connections while maintaining ultra-high vacuum integrity.
Technical Specifications:
  • Material: 316L stainless steel with high-purity ceramic insulators

AMAT 0200-35223

Product Name: ESC Chuck Assembly
Product Description: An electrostatic chuck (ESC) assembly designed for secure wafer clamping and precise temperature control in semiconductor vacuum processing chambers.
Technical Specifications:
  • Wafer Compatibility: 200mm wafers

AMAT 0140-08229

Product Name: Gas Flow Controller Module
Product Description: A high-precision mass flow controller designed to regulate the flow of process gases in semiconductor manufacturing with exceptional accuracy and repeatability.
Technical Specifications:
  • Flow Range: 0–1000 sccm

AMAT 0040-39042

Product Name: Chamber Liner Assembly
Product Description: A precision-machined protective liner installed inside semiconductor processing chambers to shield the main chamber body from plasma, chemical corrosion, and process byproduct accumulation.
Technical Specifications:
  • Material: 316L stainless steel with plasma-resistant coating

AMAT 0020-09999

Product Name: Ceramic Shield Assembly
Product Description: A high-purity ceramic shield designed to protect chamber components from plasma exposure and contamination in semiconductor processing environments.
Technical Specifications:
  • Material: High-purity alumina ceramic

AMAT 0110-00077

Product Name: RF Match Network Module
Product Description: A high-performance RF impedance matching network designed to optimize power transfer between RF generators and plasma loads in semiconductor etching and deposition systems.
Technical Specifications:
  • Frequency Range: 13.56 MHz

AMAT DIP-360-002

Product Name: Digital Panel Meter Module
Product Description: A high-precision LED digital panel meter designed for real-time display and monitoring of process parameters in semiconductor manufacturing equipment.
Technical Specifications:
  • Display: 3.5-digit LED, 14.3mm digit height

AMAT 0010-76706

Product Name: Safety Interlock Module
Product Description: A critical safety control module that monitors and enforces interlock conditions to protect personnel, wafers, and semiconductor equipment from hazardous operating conditions.
Technical Specifications:
  • Input Channels: 8 dual-channel safety interlock inputs