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AMAT 0010-03487

Product Name: Wafer Handling Robot Arm Shaft Assembly
Product Description: A high‑precision drive shaft assembly for wafer transfer robots, transmitting rotational and linear motion while maintaining rigidity, flatness, and cleanliness during wafer transportation.
Technical Specifications:
  • Material: Hard‑coated aluminum alloy with stainless steel reinforcement

AMAT 1350-00683

Product Name: Pneumatic Solenoid Valve Manifold Block
Product Description: A precision-machined manifold block designed to integrate multiple pneumatic solenoid valves into a compact assembly, enabling centralized control of various actuators, valves, and cylinders in semiconductor processing equipment.
Technical Specifications:
  • Material: Anodized 6061‑T6 aluminum alloy

AMAT 0020-34694

Product Name: GDP Oxide Process Chamber Liner
Product Description: A high-purity quartz chamber liner engineered for Gas Distribution Plate (GDP) oxide deposition processes, providing a chemically inert, non-contaminating surface that maintains process purity and uniform gas flow.
Technical Specifications:
  • Material: High-purity UV-grade fused quartz

AMAT 0270-20212

roduct Name: Wafer Robot Calibration Tool Assembly
Product Description: A precision calibration fixture used to calibrate wafer handling robots, ensuring accurate positioning, repeatability, and alignment between robot end-effectors and process module load ports.
Technical Specifications:
  • Base Material: Stainless steel with precision ground reference surfaces

AMAT 0021-09104

Product Name: Precision-Aligned Cathode Liner Assembly
Product Description: A high-purity aluminum cathode liner with precision alignment features, designed to surround PVD cathodes, confine plasma, and ensure uniform sputtering deposition while protecting chamber components.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 3700-02425

Product Name: High-Performance Formed Dovetail Seal O-Ring
Product Description: A precision-molded perfluoroelastomer (FFKM) O-ring designed for dovetail groove installations, providing exceptional vacuum sealing in high-temperature, chemically aggressive semiconductor process environments.
Technical Specifications:
  • Material: Chemraz® SC513 perfluoroelastomer

AMAT 0200-36122

Product Name: High-Temperature Resistant Ceramic Chamber Shield
Product Description: A single-piece ceramic shield component that lines the upper chamber region, protecting chamber walls from high-temperature plasma and deposition byproducts during advanced semiconductor processes.
Technical Specifications:
  • Material: High-purity yttria-stabilized zirconia (YSZ)

AMAT 0100-09126

Product Name: Remote Wiring Distribution Board Panel
Product Description: A centralized circuit board that distributes power, control signals, and data connections to remote I/O modules, sensors, and actuators in semiconductor equipment mainframes.
Technical Specifications:
  • Board Material: FR-4 glass epoxy, 4-layer PCB

AMAT 0100-02715

Product Name: High-Performance Field Control Processor Module
Product Description: A compact, embedded control module serving as the core processing unit for semiconductor equipment subsystems, managing real-time control, I/O operations, and communication with mainframe controllers.
Technical Specifications:
  • Processor: 32-bit high-speed embedded controller

AMAT 0041-89200

Product Name: Dual-Zone Electrostatic Chuck Heater Assembly
Product Description: An integrated heating element assembly embedded within electrostatic chucks (ESC), providing precise, dual-zone temperature control for wafers during advanced semiconductor deposition and etching processes.
Technical Specifications:
  • Heating Element: High-purity tungsten resistance heating circuit

AMAT 0040-86514

Product Name: High-Purity Quartz Pedestal Support Ring
Product Description: A precision-machined fused quartz component designed to support and insulate wafer pedestals in semiconductor PVD chambers, ensuring stable wafer positioning and electrical isolation during high-vacuum deposition processes.
Technical Specifications:
  • Material: High-purity synthetic fused silica (SiO₂), purity ≥99.99%

AMAT 0500-01065

Product Name: High‑Precision Vacuum Pressure Sensor Assembly
Product Description: A high‑accuracy pressure measurement device used to monitor and control vacuum levels in process chambers, load locks, and gas lines.
Technical Specifications:
  • Sensing Type: Piezoresistive or capacitance manometer