Digital guide
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AMAT 0190-00312
- Product Name: High-Precision Pressure Transducer
- Product Description: An absolute capacitance manometer for high-accuracy measurement of gas pressure in high and ultra-high vacuum (UHV) systems.
- Technical Specifications:
- Measurement Range: 1 Torr full scale, with high accuracy spanning 10-3 Torr to 1 Torr.
Detailed content
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- Output: Analog 0-10V DC and digital RS-485 output.
- Temperature Coefficient: Minimal thermal drift (< 0.1% FS/°C).
- Mounting: Compact design with 1/4″ male VCR fitting.
- Functional Features:
- High stability and repeatability for precise process control.
- Immunity to gas type composition variations (non-directional sensing).
- Hermetically sealed sensor element for long-term reliability.
- Integrated temperature compensation for consistent performance.
- Application Scenarios: Used for vacuum chamber pressure monitoring, gas line metering, and end-point detection in thin-film deposition and etching processes.
