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AMAT 3420-01078
Product Name: High‑Purity Stainless Steel Pipe Fitting Adapter
Product Description: A precision‑machined metal adapter used to connect different sizes or types of ultra‑high purity gas lines, ensuring hermetic sealing and consistent flow in semiconductor gas delivery systems.
Technical Specifications:
- Material: 316L VIM‑VAR stainless steel
Detailed content
- Surface Finish: Electropolished internal and external, Ra ≤0.2μm
- Connection Type: VCR face‑seat male/female combination
- Pressure Rating: Vacuum to 3000 PSI
- Leak Rate: ≤1×10⁻⁹ atm·cc/s He
- Size: Reducing adapter configuration for standard tubing sizes
Functional Features:
- Provides zero‑leakage transition between different pipe diameters
- Crevice‑free design eliminates gas entrapment and particle accumulation
- Resists corrosion from halogenated and corrosive process gases
- Fully compliant with SEMI standards for ultra‑high purity gas systems
- Reusable with consistent sealing performance
Application Scenarios: Used in gas cabinets, gas panels, mass flow controller installations, and process chamber gas lines.
