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AMAT 0020-70459

Product Name: Quartz Gas Distribution Plate
Product Description: A precision-fabricated quartz plate featuring a matrix of micro-drilled holes for uniform distribution of process gases across a wafer surface in semiconductor deposition chambers.
Technical Specifications:
  • Material: High-purity synthetic fused silica (quartz)

AMAT 0040-88716

Product Name: Electrostatic Chuck (ESC) Heater Assembly
Product Description: A precision heating element integrated with an electrostatic chuck (ESC) for maintaining uniform wafer temperature during high-vacuum semiconductor processes.
Technical Specifications:
  • Heating Type: Resistive thin-film heater, dual-zone temperature control

AMAT 0190-47186

Product Name: Linear Actuator Assembly with Integrated Servo Motor & Sensor
Product Description: A compact, high-precision linear drive assembly integrating a servo motor, drive mechanism, and position sensor for controlled linear motion in vacuum and industrial environments.
Technical Specifications:
  • Motor: Yaskawa SGMM-A2C3YA21 servo motor, 24V DC, 3000rpm

AMAT 0020-23045

Product Name: Ceramic Process Shield Assembly
Product Description: A high-purity ceramic shield engineered to protect chamber components from plasma erosion and deposition buildup during semiconductor etching and deposition processes.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic, 99.8% purity

AMAT 0195-17563

Product Name: Multi-Axis Motion Controller Module
Product Description: A high-performance servo controller module designed for precise motion control of robotic and positioning systems in semiconductor fabrication tools.
Technical Specifications:
  • Control Interface: Dual-port Ethernet, RS-232, and multi-channel analog/digital I/O

AMAT 0020-22493

roduct Name: Ceramic Electrical Insulator
Product Description: A high-performance ceramic component engineered to provide electrical isolation between conductive parts within high-voltage or RF process environments.
Technical Specifications:
  • Material: High-purity alumina (Al2O3) or boron nitride (BN) ceramic

AMAT 0200-20005

Product Name: Quartz Chamber Liner / Shield
Product Description: A high-purity quartz fabricated liner or shield designed to line the interior of a process chamber, protecting it from deposition and plasma damage.
Technical Specifications:
  • Material: High-purity, fused synthetic quartz (SiO2)

AMAT 1037-53108

Product Description: A high-precision, custom-machined metal component used as a structural support or adapter within the tool's chamber or frame assembly.
Technical Specifications:
  • Material: High-grade aluminum alloy or stainless steel
  • Tolerance: Precision machining to ±0.001mm

AMAT 0010-09035

Product Name: ESC (Electrostatic Chuck) Interface Module
Product Description: A dedicated control module that interfaces between the system controller and the Electrostatic Chuck (ESC), providing the necessary high-voltage and control signals.
Technical Specifications:
  • Output Voltage: Programmable high-voltage DC (up to kilovolt range)

AMAT 0100-01222

Product Name: 4-Port UPA INTC PCB Assembly

Product Description: A printed circuit board assembly (PCBA) serving as a 4-port Universal Port Array (UPA) controller for the Reflexion CMP system.
Technical Specifications:
  • Type: Multi-channel I/O interface PCB

AMAT 0010-00557

Product Name: Phase / Magnetic Detector Assembly
Product Description: An electronic sensor assembly designed to detect phase angles or magnetic field changes for position and speed feedback in precision motion systems.
Technical Specifications:
  • Type: Non-contact magnetic/phase detection
  • Supply Voltage: 24V DC

AMAT 0050-38614

Product Name: Precision Gas Line Assembly
Product Description: A pre-fabricated, bent and welded stainless steel tubing assembly for direct gas line connections in semiconductor tools.
Technical Specifications:
  • Material: Seamless 316L electropolished stainless steel tubing