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AMAT 0050-86911

Product Name: Chamber Optical Viewport Assembly

Product Description: A vacuum-compatible optical viewing assembly installed on semiconductor process chambers, allowing real-time process monitoring, plasma detection and endpoint measurement while maintaining chamber vacuum integrity.
Technical Specifications:
  • Window Material: High-purity fused quartz or sapphire

AMAT MA-14639

Product Name: Precision Diaphragm Pressure Regulator
Product Description: A high-precision single-stage pressure regulator dedicated to ultra-high purity gas systems, delivering stable output pressure with high accuracy and low hysteresis for semiconductor process gas control.
Technical Specifications:
  • Inlet Pressure Range: 0–2500 PSI

AMAT 3300-04819

Product Name: High-Purity VCR Union Fitting
Product Description: A face-seal metal union fitting designed for ultra-high purity gas delivery systems, providing a hermetic and repeatable seal for connecting precision gas pipelines in semiconductor processing tools.
Technical Specifications:
  • Material: 316L stainless steel with electropolished internal surface

AMAT 0200-10368

Product Name: Ceramic Cover Ring Assembly
Product Description: A precision-machined high-performance ceramic ring used around wafer pedestals to control plasma distribution, protect wafer edges and maintain process uniformity during semiconductor etching and deposition procedures.
Technical Specifications:
  • Material: High-purity alumina ceramic (Al₂O₃) or yttria-stabilized zirconia (YSZ)

AMAT 0200-10415

Product Name: Quartz Etch Chamber Liner

Product Description: A high-purity fused quartz liner manufactured for semiconductor etching chambers, providing a chemically inert and thermally stable interior chamber surface to isolate process plasmas from the chamber body and maintain ultra-clean processing conditions.
Technical Specifications:
  • Material: High-purity synthetic fused silica (SiO₂), purity ≥99.99%

AMAT 0010-09062

Product Name: Serial Communication & I/O Controller PCB

Product Description: A printed circuit board assembly that manages serial communication protocols and provides I/O control for interfacing the main tool controller with various peripheral modules and sensors.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller

AMAT 0020-31216

Product Name: Stainless Steel Chamber Shield Clamp Ring
Product Description: A robust, precision-machined metal ring designed to securely fasten and seal chamber shields and liners. It ensures proper alignment and prevents gas leakage in high-vacuum environments.
Technical Specifications:
  • Material: 304 Stainless Steel, passivated

AMAT MA-12432

Product Name: High-Precision Gas Pressure Regulator
Product Description: A single-stage, high-precision pressure regulator designed for the stable control of inlet pressure in ultra-high purity gas lines. It delivers a constant output pressure regardless of fluctuations in supply pressure.
Technical Specifications:
  • Inlet Pressure: Up to 3000 PSI

AMAT 0900-01053

Product Name: RF Low Pass Harmonic Filter Assembly
Product Description: A passive electronic filter designed to suppress high-frequency harmonic distortions generated by RF power supplies. It ensures clean power delivery to the process chamber and protects sensitive equipment.
Technical Specifications:
  • Frequency Range: Cut-off frequency 13.56 MHz (fundamental RF)

AMAT 0140-01587

Product Name: CEB DeviceNet Input Harness Assembly
Product Description: A pre-configured cable harness assembly designed to interface the Equipment Control Board (CEB) with DeviceNet network components. It facilitates reliable communication between the main controller and peripheral devices.
Technical Specifications:
  • Communication Protocol: DeviceNet (CAN-based)

AMAT 0021-20198

Product Name: High-Purity Ceramic Gas Baffle/Flow Distribution Plate

Product Description: A precision-engineered ceramic plate designed to disrupt, diffuse, and uniformly distribute process gas flow within a semiconductor chamber. It ensures laminar flow and prevents direct gas impingement on the wafer.

AMAT 0020-42237

Product Name: Vespel Composite Cover Ring (200mm)

Product Description: A high-performance ring fabricated from Vespel (polyimide) composite, designed for high-temperature, high-wear applications. It acts as a protective cover and thermal barrier in electrostatic chuck (ESC) assemblies.
Technical Specifications:
  • Material: Vespel SP-21 (polyimide composite with carbon fiber filler)