Digital guide
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AMAT 0050-86911
Product Name: Chamber Optical Viewport Assembly
Product Description: A vacuum-compatible optical viewing assembly installed on semiconductor process chambers, allowing real-time process monitoring, plasma detection and endpoint measurement while maintaining chamber vacuum integrity.
Technical Specifications:
- Window Material: High-purity fused quartz or sapphire
Detailed content
- Flange Material: 316L stainless steel with vacuum sealing groove
- Sealing Method: Metal C-ring or elastomer vacuum seal
- Optical Transmission: High transmittance in ultraviolet and infrared bands
- Vacuum Compatibility: Supports ultra-high vacuum up to 10⁻⁹ Torr
Functional Features:
- Maintains complete vacuum isolation while enabling optical observation
- Resists high-temperature plasma erosion and chemical corrosion
- Anti-reflective coating to improve monitoring accuracy
- Easy installation and replacement without complex chamber modification
- Compatible with optical emission spectroscopy (OES) systems
Application Scenarios: Used in etching, deposition and cleaning chambers for plasma monitoring, process endpoint detection and real-time status observation.
