Digital guide
You are here:
AMAT 0020-42237
Product Name: Vespel Composite Cover Ring (200mm)
Product Description: A high-performance ring fabricated from Vespel (polyimide) composite, designed for high-temperature, high-wear applications. It acts as a protective cover and thermal barrier in electrostatic chuck (ESC) assemblies.
Technical Specifications:
- Material: Vespel SP-21 (polyimide composite with carbon fiber filler)
Detailed content
- Wafer Compatibility: 200mm wafers (notch orientation)
- Temperature Rating: Up to 300°C continuous
- Coefficient of Thermal Expansion: Matches silicon for minimal stress
- Surface Hardness: High wear resistance, low coefficient of friction
Functional Features:
- Excellent Thermal Stability: Resists deformation at high temperatures.
- Low Outgassing: Ideal for high-vacuum environments.
- Wear Resistance: Prolongs service life in dynamic contact applications.
- Non-Contaminating: Does not shed particles or outgas volatile compounds.
- Precision Machining: Ensures a perfect fit within the ESC assembly.
Application: Used in 200mm process chambers as a cover ring for electrostatic chucks (ESC).
