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AMAT 0021-19973

Product Name: 300mm Housing Filter EEP Assembly
Product Description: A precision-engineered filter housing assembly designed for ultra-high-purity gas filtration in 300mm semiconductor process chambers, ensuring contamination-free process environments and maintaining vacuum integrity.
Technical Specifications:
  • Material: 316L electropolished stainless steel

AMAT 0040-09901

Product Name: Standard Chamber Body Assembly
Product Description: A precision-engineered standard chamber body assembly for semiconductor manufacturing equipment, providing a vacuum-tight enclosure for wafer processing operations.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0120-90622

Product Name: Arc Volts Control PCB Assembly
Product Description: A high-performance arc voltage control PCB assembly designed for precise arc voltage regulation in semiconductor plasma processing equipment.
Technical Specifications:
  • Input Voltage: 24 V DC ±10%

AMAT 0010-02477

Product Name: Electrostatic Chuck (ESC) Assembly
Product Description: A high-performance electrostatic chuck assembly designed for secure wafer clamping and precise temperature control in semiconductor process chambers.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0051-0235

Product Name: 3-Way Manifold Valve Assembly
Product Description: A precision-engineered 3-way manifold valve assembly for semiconductor process gas delivery systems, providing reliable gas flow control and distribution.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0041-04667

Product Name: Chamber Liner Assembly
Product Description: A high-purity chamber liner assembly designed for semiconductor process chambers, providing a protective interior surface while maintaining process purity and vacuum integrity.
Technical Specifications:
  • Material: High-purity quartz (fused silica)

AMAT 0200-10390

Product Name: Chamber RPS GDP Assembly
Product Description: A precision-engineered chamber component assembly for Remote Plasma Source (RPS) and Gas Distribution Plate (GDP) systems in semiconductor manufacturing equipment.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0270-70048

Product Name: 8" Lift-to-Robot Calibration Plate Assembly
Product Description: A precision calibration plate designed for accurate alignment between wafer lift mechanisms and robot transfer systems in 8" (200mm) semiconductor manufacturing equipment.
Technical Specifications:
  • Material: Anodized aluminum alloy (6061-T6)

AMAT 0010-21828

Product Name: Wafer Lift Pin Assembly
Product Description: A precision-engineered wafer lift pin assembly designed for vertical positioning of wafers in semiconductor process chambers, ensuring accurate, repeatable wafer handling with minimal contamination.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0020-42082

Product Name: Ceramic Isolator Spacer Assembly
Product Description: A high-performance ceramic isolator spacer providing electrical isolation between chamber components while maintaining mechanical stability and vacuum integrity in semiconductor processing equipment.
Technical Specifications:
  • Material: High-purity aluminum nitride (AlN) ceramic

AMAT 0021-29364

Product Name: RF Shield Isolator Ring Assembly
Product Description: A precision-engineered ceramic isolator ring designed to provide electrical isolation for RF shield components in semiconductor plasma processing chambers, ensuring stable plasma generation and containment while maintaining vacuum integrity.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT LCAT200P-20001

Product Name: 200mm Wafer Cassette Alignment Tool
Product Description: A precision alignment tool designed for accurate positioning of 200mm wafer cassettes in AMAT Centura and Endura semiconductor manufacturing systems, ensuring proper wafer loading and transfer.
Technical Specifications:
  • Material: Anodized aluminum alloy