Digital guide
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AMAT 0040-07609
Product Name: Chamber Body Flange Assembly
Product Description: A precision-engineered chamber body flange assembly providing a vacuum-tight connection between chamber components in semiconductor manufacturing equipment.
Technical Specifications:
- Material: 316L stainless steel
Detailed content
- Flange Size: CF-200
- Surface Finish: Electropolished to Ra <0.2μm
- Operating Pressure: UHV compatible (10⁻¹⁰ Torr)
- Operating Temperature: -20°C to +180°C
- Leak Rate: <1×10⁻¹⁰ atm-cc/sec He
- Dimensional Tolerance: ±0.02mm
- Bolt Circle: 12×M8 threaded holes
Functional Features:
- Vacuum-tight construction for UHV environments
- Corrosion-resistant stainless steel construction
- Smooth surfaces to minimize particle traps
- Precision machining for perfect component fit
- Easy installation and maintenance
- Low outgassing properties for clean process environments
- Compatibility with standard CF flange systems
Application Scenarios:
- Semiconductor process chamber connections
- UHV vacuum system flange assemblies
- PVD/CVD equipment chamber connections
- Vacuum measurement instruments
- Semiconductor manufacturing process integration
