Digital guide
You are here:
AMAT 0040-09901
Product Name: Standard Chamber Body Assembly
Product Description: A precision-engineered standard chamber body assembly for semiconductor manufacturing equipment, providing a vacuum-tight enclosure for wafer processing operations.
Technical Specifications:
- Material: 316L stainless steel
Detailed content
- Inner Diameter: 300 mm
- Length: 500 mm
- Wall Thickness: 12 mm
- Surface Finish: Electropolished internally to Ra <0.2 μm
- Operating Pressure: UHV compatible (10⁻¹⁰ Torr)
- Operating Temperature: -20°C to +180°C
- Leak Rate: <1×10⁻¹⁰ atm-cc/sec He
- Port Configuration: Multiple KF-40 and CF-63 ports
Functional Features:
- Vacuum-tight construction for UHV environments
- Corrosion-resistant stainless steel construction
- Smooth internal surfaces to minimize particle traps
- Multiple ports for process integration
- Easy installation and maintenance
- Precision machining for perfect component fit
- Low particle generation during operation
Application Scenarios:
- Semiconductor process chambers
- PVD/CVD equipment enclosures
- Etching systems
- Wafer processing tools
- Vacuum measurement instruments
