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AMAT 0020-22241
Product Name: Chamber Shield Assembly
Product Description: A precision-engineered chamber shield designed to protect internal components from process byproducts and maintain process purity in semiconductor manufacturing equipment.
Technical Specifications:
- Material: High-purity aluminum alloy (6061-T6)
Detailed content
- Surface Coating: Hard anodized (50μm thickness)
- Diameter: 250mm
- Height: 120mm
- Wall Thickness: 3mm
- Operating Temperature: -20°C to +180°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
- Surface Finish: Polished to Ra <0.3μm
- Dimensional Tolerance: ±0.03mm
Functional Features:
- Effective protection of chamber components from process residues
- Non-contaminating surface treatment for process purity
- High rigidity for structural stability
- Easy cleaning and maintenance
- Precision manufacturing for perfect chamber fit
- Low particle generation during operation
- Compatibility with standard AMAT process chambers
Application Scenarios:
- Semiconductor process chamber component protection
- PVD/CVD equipment internal shielding
- Etching chamber process byproduct containment
- Vacuum chamber internal component protection
- Semiconductor manufacturing process integration
