AMAT 0020-78186 Chamber Liner Shield Assembly
Product Description: A protective component designed to shield critical chamber components from process byproducts and plasma damage in semiconductor etching and deposition systems. Extends chamber maintenance intervals and improves process consistency by containing process contaminants.
Technical Specifications:
- Material: High-purity 316L stainless steel with yttria coating
- Coating Thickness: 200μm uniform protective coating










