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AMAT 0020-34048

Product Name: Vacuum Chamber Seal Assembly
Product Description: A high-integrity vacuum seal assembly for semiconductor process chambers. It provides reliable, leak-tight sealing between chamber components while maintaining compatibility with ultra-high vacuum environments.
Technical Specifications:
  • Material: Fluoroelastomer (Viton) with 316L stainless steel retainer

AMAT 0200-02764

Product Name: Ceramic Isolator Ring
Product Description: A high-performance ceramic isolator ring designed for electrical isolation in semiconductor vacuum chambers. It provides reliable insulation between chamber sections while maintaining mechanical stability and vacuum integrity.
Technical Specifications:
  • Material: High-purity aluminum nitride (AlN) ceramic

AMAT 0200-39199

Product Name: Quartz Process Shield Assembly
Product Description: A precision-engineered quartz shield assembly for semiconductor process chambers. It provides high-purity, non-contaminating protection for chamber components while maintaining excellent thermal and electrical properties.
Technical Specifications:
  • Material: High-purity fused silica quartz (99.999%)

AMAT 0190-76273

Product Name: Digital I/O Interface PCB Assembly
Product Description: A high-density digital input/output PCB assembly for semiconductor equipment control systems. It provides reliable interface between the main controller and various chamber components, enabling precise process control and monitoring.
Technical Specifications:
  • Input Voltage: 24 V DC ± 10%

AMAT 0226-09003

Product Name: RF Signal Harness Assembly
Product Description: A high-performance RF signal harness assembly designed for reliable signal transmission between RF power modules and process chambers in semiconductor manufacturing equipment. It ensures low-loss, interference-free RF signal delivery in high-vacuum environments.
Technical Specifications:
  • Material: High-purity PTFE insulation with tinned copper conductors

AMAT 0040-76142

Product Description: A high-precision chamber liner component for 200mm semiconductor processing systems, providing a protective interior surface for vacuum chambers while maintaining process purity.
Technical Specifications:
  • Material: High-purity aluminum alloy

AMAT 0200-05337

Product Name: Gas Distribution Manifold Assembly
Product Description: A precision-engineered gas distribution manifold for semiconductor process chambers, designed for safe and controlled delivery of process gases into vacuum environments.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0021-42914

Product Name: Thermal Management Component Assembly
Product Description: A specialized thermal management component designed for precise temperature control in advanced semiconductor manufacturing processes. It efficiently transfers heat while maintaining electrical isolation and vacuum compatibility.
Technical Specifications:
  • Material: Composite ceramic-metal construction

AMAT 0270-20016

Product Name: Lift Bellows Wrench
Product Description: A specialized tool designed for the installation and removal of lift bellows in semiconductor vacuum chambers, ensuring proper alignment and sealing during maintenance operations.
Technical Specifications:
  • Material: High-strength alloy steel

AMAT 0100-94036

Product Description: A high-performance serial communication PCB card and field control processor for semiconductor equipment, providing reliable data transmission and equipment control functionality.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0100-20063

Product Name: TC Gauge Board / Field Control Processor
Product Description: A high-performance control module and thermocouple gauge interface board for semiconductor equipment, providing reliable temperature measurement and process control functionality.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0040-02519

Product Name: Chamber Body Assembly
Product Description: A main chamber body component for 150mm semiconductor processing systems, providing the primary vacuum enclosure for wafer fabrication processes.
Technical Specifications:
  • Material: 304L stainless steel