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AMAT 0200-02764
Product Name: Ceramic Isolator Ring
Product Description: A high-performance ceramic isolator ring designed for electrical isolation in semiconductor vacuum chambers. It provides reliable insulation between chamber sections while maintaining mechanical stability and vacuum integrity.
Technical Specifications:
- Material: High-purity aluminum nitride (AlN) ceramic
Detailed content
- Outer Diameter: 250 mm
- Inner Diameter: 200 mm
- Thickness: 10 mm
- Thermal Conductivity: > 180 W/m·K
- Dielectric Constant: 8.8 at 1 MHz
- Compressive Strength: > 2000 MPa
- Operating Temperature: -40°C to +800°C
- Vacuum Compatibility: UHV suitable (10⁻⁹ Torr)
Functional Features:
- Exceptional thermal conductivity for efficient heat dissipation
- Excellent electrical insulation properties
- High mechanical strength and shock resistance
- Low thermal expansion coefficient matching silicon wafers
- Chemical inertness to semiconductor process chemicals
- Precision machining for tight dimensional tolerances
Application Scenarios:
- Semiconductor wafer processing equipment
- Electrostatic chuck (ESC) assemblies
- Vacuum chamber components
- RF power delivery systems
- High-temperature semiconductor processing
